<SEC-DOCUMENT>0001140361-16-069861-index.html : 20160615
<SEC-HEADER>0001140361-16-069861.hdr.sgml : 20160615
<ACCEPTANCE-DATETIME>20160615162716
ACCESSION NUMBER:		0001140361-16-069861
CONFORMED SUBMISSION TYPE:	SC 13D/A
PUBLIC DOCUMENT COUNT:		3
FILED AS OF DATE:		20160615
DATE AS OF CHANGE:		20160615
GROUP MEMBERS:		AMIT SOLOMON
GROUP MEMBERS:		BENJAMIN NAHUM
GROUP MEMBERS:		JAMES MCAREE
GROUP MEMBERS:		NEUBEGER BERMAN FIXED INCOME HOLDINGS LLC
GROUP MEMBERS:		NEUBERGER BERMAN INVESTMENT ADVISERS LLC
GROUP MEMBERS:		NEUBERGER BERMAN LLC

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13D/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-44773
		FILM NUMBER:		161715540

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Neuberger Berman Group LLC
		CENTRAL INDEX KEY:			0001465109
		IRS NUMBER:				611591182
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13D/A

	BUSINESS ADDRESS:	
		STREET 1:		605 THIRD AVENUE
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10158
		BUSINESS PHONE:		212-476-9000

	MAIL ADDRESS:	
		STREET 1:		605 THIRD AVENUE
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10158
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13D/A
<SEQUENCE>1
<FILENAME>doc1.htm
<DESCRIPTION>NONE
<TEXT>
Document 1 - file: doc1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.14
<SEQUENCE>2
<FILENAME>ex99_14.htm
<DESCRIPTION>EX-99.14
<TEXT>
Document 2 - file: ex99_14.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.15
<SEQUENCE>3
<FILENAME>ex99_15.htm
<DESCRIPTION>EX-99.15
<TEXT>
Document 3 - file: ex99_15.htm

</DOCUMENT>
</SEC-DOCUMENT>