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Filing Detail
Form 10-K405 - Annual report [Sections 13 and 15(d), S-K Item 405]:
SEC Accession No. 0000912057-02-011883
Filing Date
2002-03-27
Accepted
2002-03-27 00:00:00
Documents
3
Period of Report
2001-12-31

Document Format Files

Seq Description Document Type Size
1 10-K405 a2074072z10-k405.htm 10-K405 616222
3 EX-21 a2074072zex-21.htm EX-21 4593
4 EX-23 a2074072zex-23.htm EX-23 2437
  Complete submission text file 0000912057-02-011883.txt   624903
Mailing Address 3050 ZANKER RD SAN JOSE CA 95134
Business Address 3050 ZANKER RD SAN JOSE CA 95134 4083218835
ULTRATECH STEPPER INC (Filer) CIK: 0000909791 (see all company filings)

IRS No.: 943169580 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K405 | Act: 34 | File No.: 000-22248 | Film No.: 02588306
SIC: 3559 Special Industry Machinery, NEC