EXHIBIT 23

CONSENT OF ERNST & YOUNG LLP, INDEPENDENT AUDITORS

We consent to the incorporation by reference in the Registration Statements
(Form S-8 Nos. 333-43952 and 333-33338) pertaining to the 1993 Stock
Option/Stock Issuance Plan of Ultratech Stepper, Inc. of our report dated
January 19, 2001, with respect to the consolidated financial statements and
schedule of Ultratech Stepper, Inc. included in the Annual Report (Form 10-K)
for the year ended December 31, 2000.

                                                           /s/ ERNST & YOUNG LLP

San Jose, California
March 21, 2001