<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM ULTRATECH
STEPPER INC., FORM 10-Q AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH
FINANCIAL STATEMENTS.

<MULTIPLIER> 1,000

                             
<PERIOD-TYPE>                   9-MOS
<FISCAL-YEAR-END>                          DEC-31-2000
<PERIOD-START>                             JUL-01-2000
<PERIOD-END>                               SEP-30-2000
<CASH>                                          59,052
<SECURITIES>                                    93,225
<RECEIVABLES>                                   20,506
<ALLOWANCES>                                       279
<INVENTORY>                                     30,130
<CURRENT-ASSETS>                               206,479
<PP&E>                                          59,716
<DEPRECIATION>                                  32,884
<TOTAL-ASSETS>                                 247,305
<CURRENT-LIABILITIES>                           61,626
<BONDS>                                              0
<PREFERRED-MANDATORY>                                0
<PREFERRED>                                          0
<COMMON>                                            21
<OTHER-SE>                                     185,410
<TOTAL-LIABILITY-AND-EQUITY>                   247,305
<SALES>                                         92,805
<TOTAL-REVENUES>                               105,644
<CGS>                                           57,412
<TOTAL-COSTS>                                   66,928
<OTHER-EXPENSES>                                19,822
<LOSS-PROVISION>                                 (510)
<INTEREST-EXPENSE>                                 211
<INCOME-PRETAX>                                  6,659
<INCOME-TAX>                                     2,433
<INCOME-CONTINUING>                              4,226
<DISCONTINUED>                                       0
<EXTRAORDINARY>                                      0
<CHANGES>                                     (18,883)
<NET-INCOME>                                  (14,657)
<EPS-BASIC>                                     (0.69)
<EPS-DILUTED>                                   (0.69)