Subsequent Event (Details) - Ultratech, Veeco and Ulysses Merger - Subsequent Event	Feb. 02, 2017 USD ($) $ / right
Subsequent Event [Line Items]
Condition to close, minimum cash held requirement \| $	$ 180,000,000
Right to receive cash without interest (in dollars per right) \| $ / right	21.75
Conversion of right to shares ratio	0.2675

Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event.

No definition available.

Name:	us-gaap_SubsequentEventLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration