XML 13 R1.htm IDEA: XBRL DOCUMENT v3.5.0.2
Document And Entity Information
9 Months Ended
Oct. 01, 2016
shares
Entity Information [Line Items]  
Document Type 10-Q
Amendment Flag false
Document Period End Date Oct. 01, 2016
Document Fiscal Year Focus 2016
Document Fiscal Period Focus Q3
Entity Registrant Name ULTRATECH INC
Entity Central Index Key 0000909791
Current Fiscal Year End Date --12-31
Entity Filer Category Accelerated Filer
Entity Common Stock, Shares Outstanding 26,868,613