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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 HnJ4lreRCq2XyE9kefAbzEiZsYDrKT+C9MJhauAWvGCcp4c/WVbD29xYA6Fe4cBI
 9PP7OvEnuTqB/Mo30or25w==

<SEC-DOCUMENT>0000909791-09-000006.txt : 20090203
<SEC-HEADER>0000909791-09-000006.hdr.sgml : 20090203
<ACCEPTANCE-DATETIME>20090203180543
ACCESSION NUMBER:		0000909791-09-000006
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20090202
FILED AS OF DATE:		20090203
DATE AS OF CHANGE:		20090203

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			JEWLER SCOTT
		CENTRAL INDEX KEY:			0001433555

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		09566138

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		408) 321-8835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER ROAD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0303</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2009-02-02</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000909791</issuerCik>
        <issuerName>ULTRATECH INC</issuerName>
        <issuerTradingSymbol>UTEK</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001433555</rptOwnerCik>
            <rptOwnerName>JEWLER SCOTT</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>3050 ZANKER ROAD</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>SAN JOSE</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>95134</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Sr. VP Sales and Marketing</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <transactionDate>
                <value>2009-02-02</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>6000</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>16000</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">Represents restricted stock units awarded under the Issuer's 1993 Stock Option/Stock Issuance Plan.  Each restricted stock unit will entitle the Reporting Person to one share of the Issuer's common stock upon the designated issuance date following the vesting of that unit.  The restricted stock units vest in three (3) successive equal annual installments upon the Reporting Person's completion of each year of service with the Issuer over the three (3) year period measured from January 1, 2009, and the shares underlying those vested units will be issued on January 31, 2012.  The units will vest in full on an accelerated basis, and the underlying shares of the Issuer's common stock will become immediately issuable, upon a change in ownership or control of the Issuer or upon the Reporting Person's termination of service with the Issuer under certain circumstances.</footnote>
        <footnote id="F2">Includes (i) 10,000 shares subject to restricted stock units which will vest in three (3) successive equal annual installments over the Reporting Person's completion of each year of service with the Issuer over the three (3)-year period measured from December 13, 2007, and the shares underlying those vested units will be issued on December 13, 2010 and (ii) 6,000 shares subject to the reported restricted stock unit award.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>By: Bruce R. Wright, Attorney-in-Fact  For: Scott Jewler</signatureName>
        <signatureDate>2009-02-03</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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