-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 WUGzw5LwynrMGPfTOO91Cfbdi5JkP1ERv98W2hrO4SOvGU7/WEMxQeBmeR/tz+5x
 ZfUZhbx0i2GJJKUODHe83Q==

<SEC-DOCUMENT>0000909791-06-000008.txt : 20060202
<SEC-HEADER>0000909791-06-000008.hdr.sgml : 20060202
<ACCEPTANCE-DATETIME>20060202180405
ACCESSION NUMBER:		0000909791-06-000008
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20060131
FILED AS OF DATE:		20060202
DATE AS OF CHANGE:		20060202

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Friedman Rick Preston
		CENTRAL INDEX KEY:			0001294115

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		06574903

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		(408) 321-8835

	MAIL ADDRESS:	
		STREET 1:		C/O ULTRATECH, INC.
		STREET 2:		3050 ZANKER ROAD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2006-01-31</periodOfReport>

    <issuer>
        <issuerCik>0000909791</issuerCik>
        <issuerName>ULTRATECH INC</issuerName>
        <issuerTradingSymbol>UTEK</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001294115</rptOwnerCik>
            <rptOwnerName>Friedman Rick Preston</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O ULTRATECH, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>3050 ZANKER ROAD</rptOwnerStreet2>
            <rptOwnerCity>SAN JOSE</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>95134</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Sr. VP of Sales and Marketing</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2006-01-31</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
                <footnoteId id="F1"/>
                <footnoteId id="F2"/>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>5000</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                    <footnoteId id="F3"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>5000</value>
                    <footnoteId id="F4"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value></value>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">Each restricted stock unit represents a contingent right to receive one share of Ultratech, Inc. common stock.</footnote>
        <footnote id="F2">A portion of the shares of the issuer's common stock which otherwise become issuable under the vested units will be withheld by the issuer in satisfaction of the applicable withholding taxes.</footnote>
        <footnote id="F3">The restricted stock units vest in three (3) successive equal annual installments upon the Reporting Person's completion of each year of service over the three (3) year period measured from January 1, 2006 and the shares underlying those vested units will be issued on January 31, 2009.  The units will vest on an accelerated basis, and the underlying shares of the issuer's common stock will become immediately issuable, upon a change in control or ownership of the issuer, and a portion of the units will vest, and the shares of the issuer's common stock underlying those units will become immediately issuable, upon the Reporting Person's termination of employment under certain defined circumstances.</footnote>
        <footnote id="F4">5,000 shares underlying restricted stock units.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>Rick Preston Friedman</signatureName>
        <signatureDate>2006-02-02</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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