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Filing Detail
Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0000909791-04-000005
Filing Date
2004-03-03
Accepted
2004-03-03 16:00:55
Documents
2
Period of Report
2004-02-13

Document Format Files

Seq Description Document Type Size
1 PRIMARY DOCUMENT edgar.html 4  
1 PRIMARY DOCUMENT edgar.xml 4 3254
3 POWER OF ATTORNEY poa.htm EX-24 2918
  Complete submission text file 0000909791-04-000005.txt   8061
Mailing Address 3050 ZANKER RD SAN JOSE CA 95134
Business Address 3050 ZANKER RD SAN JOSE CA 95134 4083218835
ULTRATECH INC (Issuer) CIK: 0000909791 (see all company filings)

IRS No.: 943169580 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address
Business Address ULRATECH STEPPER 3050 ZANKER ROAD SAN JOSE CA 95134
SMITH ERIK C (Reporting) CIK: 0001227981 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-22248 | Film No.: 04646158