POWER OF ATTORNEY

KNOW ALL MEN BY THESE PRESENTS, that the undersigned hereby constitutes

and appoints Bruce R. Wright, Todd Schull and Arthur Zafiropoulo, and

each of them, his true and lawful attorney-in-fact to:

(1) execute for and on behalf of the undersigned, in the undersigned's

capacity as an Executive Officer and/or Director of Ultratech Inc.

(the "Company"), any and all Forms 3, 4 and 5 required to be filed

by the undersigned in accordance with Section 16(a) of the Securities

Exchange Act of 1934 and the rules thereunder;

(2) do and perform any and all acts for and on behalf of the undersigned

which may be necessary or desirable to complete and execute any such Form

3, 4 or 5, or other required report, if any, and timely file such form or

report with the United States Securities and Exchange Commission and any

stock exchange or similar authority; and

(3) take any other action of any type whatsoever in connection with the

foregoing which, in the opinion of such attorney-in-fact, may be of benefit

to, in the best interest of, or legally required by, the undersigned, it

being understood that the documents executed by such attorney-in-fact, on

behalf of the undersigned, pursuant to this Power of Attorney, shall be in

such form and shall contain such terms and conditions as such attorney in

fact may approve in his discretion.

The undersigned hereby grants to each such attorney-in-fact full power and

authority to do and perform each and every act and thing whatsoever

requisite, necessary, and proper to be done in the exercise of any of the

rights and powers herein granted, as fully to all intents and purposes as

the undersigned might or could do if personally present, with full power

of substitution or revocation, hereby ratifying and confirming all that

such attorney-in-fact, or his substitute or substitutes, shall lawfully

do or cause to be done by virtue of this Power of Attorney and the rights

and powers herein granted.  The undersigned acknowledges that no such

attorney in fact, in serving in such a capacity at the request of the

undersigned, is hereby assuming, nor is the Company hereby assuming, any

of the undersigned's responsibilities to comply with Section 16 of the

Securities Exchange Act of 1934.

This Power of Attorney shall remain in full force and effect until the

undersigned is no longer required to file Form 3, 4 and 5, or other reports

under Section 16, if any, with respect to the undersigned's holdings of,

and transactions in, securities issued by the Company, unless earlier

revoked by the undersigned in a signed writing delivered to the foregoing

attorneys-in-fact.

IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to

be executed as of this 24th day of October, 2003.



Erik C. Smith

Signature



Erik C. Smith

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