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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 QeewUKlJgAZQzVYf2K2VKOYLrwrVv2XJ+0LpQeuFCTbNV/i2ziA6duLvv1pmtcj3
 3beDPWiFbwh7kCUyV5wiZA==

<SEC-DOCUMENT>0000909791-03-000061.txt : 20031021
<SEC-HEADER>0000909791-03-000061.hdr.sgml : 20031021
<ACCEPTANCE-DATETIME>20031021140347
ACCESSION NUMBER:		0000909791-03-000061
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20031020
FILED AS OF DATE:		20031021

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			SMITH ERIK C
		CENTRAL INDEX KEY:			0001227981

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		03949499

	BUSINESS ADDRESS:	
		STREET 1:		ULRATECH STEPPER
		STREET 2:		3050 ZANKER ROAD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	ULTRATECH STEPPER INC
		DATE OF NAME CHANGE:	19930727
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>
    <schemaVersion>X0201</schemaVersion>

    <documentType>4</documentType><periodOfReport>2003-10-20</periodOfReport>
    <issuer>
        <issuerCik>0000909791</issuerCik>
        <issuerName>ULTRATECH INC</issuerName>
        <issuerTradingSymbol>UTEK</issuerTradingSymbol></issuer><reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001227981</rptOwnerCik>
            <rptOwnerName>SMITH ERIK C</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O ULTRATECH, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>3050 ZANKER ROAD</rptOwnerStreet2>
            <rptOwnerCity>SAN JOSE</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>95134</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
            <reportingOwnerRelationship>
<isDirector>0</isDirector><isOfficer>1</isOfficer><isTenPercentOwner>0</isTenPercentOwner><isOther>0</isOther><officerTitle>Sr. VP - Worldwide Sales</officerTitle></reportingOwnerRelationship></reportingOwner><nonDerivativeTable><nonDerivativeTransaction><securityTitle><value>Common Stock</value></securityTitle><transactionDate><value>2003-10-20</value></transactionDate><transactionCoding><transactionFormType>4</transactionFormType><transactionCode>S</transactionCode><equitySwapInvolved>0</equitySwapInvolved></transactionCoding><transactionAmounts><transactionShares><value>1172</value><footnoteId id="F1"/></transactionShares><transactionPricePerShare><value>30.83</value></transactionPricePerShare><transactionAcquiredDisposedCode><value>D</value></transactionAcquiredDisposedCode></transactionAmounts><postTransactionAmounts><sharesOwnedFollowingTransaction><value>1763</value></sharesOwnedFollowingTransaction></postTransactionAmounts><ownershipNature><directOrIndirectOwnership><value>D</value></directOrIndirect
Ownership><natureOfOwnership><value/></natureOfOwnership></ownershipNature></nonDerivativeTransaction><nonDerivativeTransaction><securityTitle><value>Common Stock</value></securityTitle><transactionDate><value>2003-10-20</value></transactionDate><transactionCoding><transactionFormType>4</transactionFormType><transactionCode>S</transactionCode><equitySwapInvolved>0</equitySwapInvolved></transactionCoding><transactionAmounts><transactionShares><value>1075</value></transactionShares><transactionPricePerShare><value>30.85</value></transactionPricePerShare><transactionAcquiredDisposedCode><value>D</value></transactionAcquiredDisposedCode></transactionAmounts><postTransactionAmounts><sharesOwnedFollowingTransaction><value>688</value></sharesOwnedFollowingTransaction></postTransactionAmounts><ownershipNature><directOrIndirectOwnership><value>D</value></directOrIndirectOwnership><natureOfOwnership><value/></natureOfOwnership></ownershipNature></nonDerivativeTransaction></nonDerivativeTable><footnotes><footnote id="F
1">Shares were acquired by the Reporting Person under the Issuer's Employee Stock Purchase Plan in a transaction exempt under SEC Rule 16b-3(c).</footnote></footnotes><remarks/><ownerSignature><signatureName>Bruce R. Wright, Attorney-in-Fact</signatureName><signatureDate>2003-10-21</signatureDate></ownerSignature></ownershipDocument>

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</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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