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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
 MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen
 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 V/pOQ72pjti8hj4l+zUnp55tZhP5xFwFB1MbX0Ks1SHMmVPsr1+InyMvUXjm/vxV
 aRgxQpCb0zCGXO7IZyNnrg==

<SEC-DOCUMENT>0000909791-03-000030.txt : 20030606
<SEC-HEADER>0000909791-03-000030.hdr.sgml : 20030606
<ACCEPTANCE-DATETIME>20030605173439
ACCESSION NUMBER:		0000909791-03-000030
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20030605
FILED AS OF DATE:		20030606

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			TIMMINS RICK
		CENTRAL INDEX KEY:			0001234481

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-22248
		FILM NUMBER:		03734637

	BUSINESS ADDRESS:	
		STREET 1:		C/O CISCO SYSTEMS
		STREET 2:		170 WEST TASMAN DRIVE
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

	MAIL ADDRESS:	
		STREET 1:		170 WEST TASMAN DRIVE
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ULTRATECH STEPPER INC
		CENTRAL INDEX KEY:			0000909791
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				943169580
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
		BUSINESS PHONE:		4083218835

	MAIL ADDRESS:	
		STREET 1:		3050 ZANKER RD
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>
    <schemaVersion>X0101</schemaVersion>

    <documentType>4</documentType><periodOfReport>2003-06-05</periodOfReport>
    <issuer>
        <issuerCik>0000909791</issuerCik>
        <issuerName>ULTRATECH STEPPER INC</issuerName>
        <issuerTradingSymbol>UTEK</issuerTradingSymbol></issuer><reportingOwner><reportingOwnerId>
            <rptOwnerCik>0001234481</rptOwnerCik>
            <rptOwnerName>TIMMINS RICK</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>  </rptOwnerStreet1>
            <rptOwnerStreet2>  </rptOwnerStreet2>
            <rptOwnerCity>  </rptOwnerCity>
            <rptOwnerState>  </rptOwnerState>
            <rptOwnerZipCode>  </rptOwnerZipCode>
        </reportingOwnerAddress>
            <reportingOwnerRelationship>
<isDirector>1</isDirector><isOfficer>0</isOfficer><isTenPercentOwner>0</isTenPercentOwner><isOther>0</isOther></reportingOwnerRelationship></reportingOwner><derivativeSecurity><securityTitle><value>Options (Right to Buy)</value></securityTitle><conversionOrExercisePrice><value>18.89</value></conversionOrExercisePrice><transactionDate><value>2003-06-05</value></transactionDate><transactionCoding><transactionFormType>5</transactionFormType><transactionCode>A</transactionCode><equitySwapInvolved>0</equitySwapInvolved></transactionCoding><transactionAmounts><transactionShares><value>8000</value></transactionShares><transactionValue><value>0</value><footnoteId id="F2"/></transactionValue><transactionAcquiredDisposedCode><value>A</value></transactionAcquiredDisposedCode></transactionAmounts><exerciseDate><value>2003-06-05</value><footnoteId id="F1"/></exerciseDate><expirationDate><value>2013-06-04</value></expirationDate><underlyingSecurity><underlyingSecurityTitle><value>Common Stock</value></underlyingSecurityTi
tle><underlyingSecurityShares><value>8000</value></underlyingSecurityShares></underlyingSecurity><postTransactionAmounts><sharesOwnedFollowingTransaction><value>8000</value></sharesOwnedFollowingTransaction></postTransactionAmounts><ownershipNature><directOrIndirectOwnership><value>D</value></directOrIndirectOwnership><natureOfOwnership><value></value></natureOfOwnership></ownershipNature></derivativeSecurity><footnotes><footnote id="F1">Option is immediately exercisable, but underlying shares are subject to repurchase by the Company at cost should optionee cease to provide service to the Company prior to vesting in such shares.  The Company's right of repurchase shall lapse as for 100% of the shares upon completion of one (1) year of Board Service measured from the date of grant.</footnote><footnote id="F2">The option was granted in an exempt transaction pursuant to SEC Rule 16b-3(d).</footnote></footnotes><ownerSignature><signatureName>Bruce R. Wright, Attorney-in-Fact</signatureName><signatureDate>2003-06
- -05</signatureDate></ownerSignature></ownershipDocument>

</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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