EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS

    We hereby consent to the incorporation by reference in the Registration
Statement on Form S-8 (No. 333-56366) of ADE Corporation of our report dated
June 19, 2001 relating to the financial statements and financial statement
schedule, which appears in this Form 10-K.

PricewaterhouseCoopers LLP

Boston, Massachusetts
July 27, 2001