Inventory (Details) (USD $)	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Inventory Disclosure [Abstract]
Raw materials	$ 9,120,000	$ 4,862,000
Work in process	35,868,000	14,656,000
Finished goods	14,352,000	2,570,000
Deferred costs	11,014,000	6,550,000
Total Inventories	70,354,000	28,638,000
Inventory write-downs and reserves	$ 9,100,000	$ 17,000,000	$ 500,000