Inventory (Details) (USD $)	3 Months Ended
	Mar. 31, 2013	Mar. 31, 2012	Dec. 31, 2012
Inventory Disclosure [Abstract]
Raw materials	$ 6,315,000		$ 4,862,000
Work in process	25,061,000		14,656,000
Finished goods	6,390,000		2,570,000
Deferred costs	6,211,000		6,550,000
Total Inventories	43,977,000		28,638,000
Inventory reserves	4,600,000		3,600,000
Inventory write-downs and reserves	$ 3,200,000	$ 1,900,000