BALANCE SHEET DETAILS 2 (Details) (USD $)	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
interest expense related to MSA	$ 300,000	$ 2,300,000	$ 4,500,000
Other	21,000,000	34,500,000	31,900,000
Accrued and other liabilities
Accrued salaries and benefits and other employee related	67,486,000	54,993,000
Accrued restructuring	25,441,000	16,222,000
Royalties and licenses	8,204,000	4,295,000
Advance payments from customer	4,668,000	10,000,000
Warranty accruals and accrued returns	4,406,000	10,411,000
Income taxes payable	3,219,000	7,863,000
Grants to be repaid	579,000	5,054,000
Deferred income tax liability, current portion	208,000	304,000
Current portion of market price adjustment to supply agreement	0	20,953,000
Other	41,195,000	73,415,000
Total accrued and other liabilities	155,406,000	203,510,000
Other long-term liabilities
Income taxes payable	50,334,000	26,744,000
Accrued pension liability	38,418,000	40,087,000
Long-term debt and capital lease obligations, less current portion	7,010,000	5,602,000
Long-term technology license payable	3,568,000	0
Advance payments from customer	0	4,668,000
Other	21,397,000	23,078,000
Total other long-term liabilities	120,727,000	100,179,000
Percentage of value of product shipped to the customer required to be paid annually as minimum repayment of customer advances	15.00%
Minimum repayment of customer advance required to be made annually, if minimum quantity of products is not supplied	10,000,000
Repayment of advances during the period under an agreement	10,000,000	10,000,000	10,000,000
Outstanding note payable	3,600,000	7,500,000
Outstanding note payable included in other long-term liabilities	2,900,000	6,600,000
Outstanding note payable included in accounts payable	700,000	900,000
Payment to equity method investee relating to a cost sharing arrangement for facility services	$ 6,700,000	$ 6,600,000	$ 3,700,000