INTANGIBLE ASSETS, NET (Details) (USD $)	12 Months Ended
	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
Intangible assets, net
Intangible assets, net	$ 27,257,000	$ 20,594,000
Estimated future amortization
2013	6,505,000
2014	4,829,000
2015	4,080,000
2016	2,957,000
2017	2,831,000
Thereafter	6,055,000
Total future amortization	27,257,000	20,594,000
Technology Licenses
Intangible assets, net
Intangible assets, gross	18,123,000	17,564,000
Accumulated Amortization	(16,171,000)	(12,420,000)
Intangible assets, net	1,952,000	5,144,000
Amortization expense	3,700,000	3,500,000	5,200,000
Estimated future amortization
2013	1,283,000
2014	427,000
2015	242,000
2016	0
2017	0
Thereafter	0
Total future amortization	1,952,000	5,144,000
Acquisition‑Related Intangible Assets
Intangible assets, net
Intangible assets, gross	48,550,000	33,100,000
Accumulated Amortization	(23,245,000)	(17,650,000)
Intangible assets, net	25,305,000	15,450,000
Amortization expense	5,600,000	4,600,000	4,500,000
Estimated future amortization
2013	5,222,000
2014	4,402,000
2015	3,838,000
2016	2,957,000
2017	2,831,000
Thereafter	6,055,000
Total future amortization	$ 25,305,000	$ 15,450,000