-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
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 Zic0/OanaW9e7Wxw2+Xb8A==

<SEC-DOCUMENT>0001322950-05-000007.txt : 20051205
<SEC-HEADER>0001322950-05-000007.hdr.sgml : 20051205
<ACCEPTANCE-DATETIME>20051205145640
ACCESSION NUMBER:		0001322950-05-000007
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20051201
FILED AS OF DATE:		20051205
DATE AS OF CHANGE:		20051205

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			ELDER WILLIAM W R
		CENTRAL INDEX KEY:			0001066598

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-26482
		FILM NUMBER:		051243876

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		6034298761

	MAIL ADDRESS:	
		STREET 1:		UNITRODE CORP
		STREET 2:		7 CONTINENTAL BLVD
		CITY:			MERRIMACK
		STATE:			NH
		ZIP:			03054

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			TRIKON TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0000868326
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				954054321
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		RINGLAND WAY
		STREET 2:		.
		CITY:			NEWPORT
		STATE:			X0
		ZIP:			NP18 2TA
		BUSINESS PHONE:		011-44-1-633-414-000

	MAIL ADDRESS:	
		STREET 1:		10540 TALBERT AVENUE
		STREET 2:		#100
		CITY:			FOUNTAIN VALLEY
		STATE:			CA
		ZIP:			92708

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	PLASMA & MATERIALS TECHNOLOGIES INC
		DATE OF NAME CHANGE:	19950713
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2005-12-01</periodOfReport>

    <notSubjectToSection16>1</notSubjectToSection16>

    <issuer>
        <issuerCik>0000868326</issuerCik>
        <issuerName>TRIKON TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>TRKN</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001066598</rptOwnerCik>
            <rptOwnerName>ELDER WILLIAM W R</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>1139 KARLSTAD DRIVE</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>SUNNYVALE</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>94089</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeTransaction>
            <securityTitle>
                <value>NQ stock option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>2.11</value>
            </conversionOrExercisePrice>
            <transactionDate>
                <value>2005-12-01</value>
            </transactionDate>
            <deemedExecutionDate>
                <value>2005-12-01</value>
            </deemedExecutionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>D</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionTimeliness>
                <value></value>
            </transactionTimeliness>
            <transactionAmounts>
                <transactionShares>
                    <value>20000</value>
                </transactionShares>
                <transactionPricePerShare>
                    <footnoteId id="F1"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <exerciseDate>
                <footnoteId id="F1"/>
            </exerciseDate>
            <expirationDate>
                <value>2014-04-05</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>20000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>0</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeTransaction>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">This option, which provided for vesting in equal increments of 25% over a four year period beginning from the date of grant, was assumed by New Athletics, Inc. in the merger and replaced with an option to purchase 5,800 shares of New Athletics, Inc. common stock.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>William W R Elder</signatureName>
        <signatureDate>2005-12-01</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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