Exhibit 23.1

                         Consent of Independent Auditors

                  We consent to the reference to our firm under the caption
"Experts" in the Registration Statement (Form S-3 No. 333-87486) and related
Prospectus of Trikon Technologies, Inc. for the registration of 1,093,348 shares
of its common stock and to the incorporation by reference therein of our report
dated February 1, 2002, with respect to the consolidated financial statements
and schedule of Trikon Technologies, Inc. included in its Annual Report (Form
10-K) for the year ended December 31, 2001, filed with the Securities and
Exchange Commission.

                                                           /s/ Ernst & Young LLP

                                                               ERNST & YOUNG LLP

                  Bristol, England

                  June 12, 2002