E



                                                                       Exhibit 5


                       Opinion of McDermott, Will & Emery

                                                                     May 3, 2002

Trikon Technologies, Inc.
Ringland Way
Newport, Gwent  NP18 2TA
United Kingdom

          Re:  Resale of up to an aggregate of 1,093,348 shares of
               common stock, no par value (the "Issued Shares"), of
               Trikon Technologies, Inc., a California corporation
               (the "Company").


Ladies and Gentlemen:

         We have acted as your special counsel in connection with the
preparation and filing with the Securities and Exchange Commission (the "SEC")
of a registration statement on Form S-3 (the "Registration Statement") under the
Securities Act of 1933, as amended (the "Securities Act"), relating to the
Issued Shares, which may be offered for sale from time to time by the selling
stockholders named in the Registration Statement.

         In arriving at the opinions expressed below we have examined the
Registration Statement, each of the Stock Purchase Agreements pursuant to which
the Issued Shares were acquired, dated April 16, 2002, between the Company and
the selling stockholders, the resolutions of the Board of Directors of the
Company relating to the issuance of the Issued Shares, and such other documents
as we have deemed necessary to enable us to express the opinions hereinafter set
forth.

         We have also reviewed such questions of law as we considered necessary
or appropriate for the purposes of such opinions. In addition, we have examined
and relied, to the extent we deemed proper, on certificates of officers of the
Company as to factual matters, on the originals or copies certified or otherwise
identified to our satisfaction of all such corporate records of the Company and
such other instruments and certificates of public officials and other persons as
we have deemed appropriate. In our examination, we have assumed the authenticity
of all documents submitted to us as originals, the conformity to the original
documents of all documents submitted to as copies, and the genuineness of all
signatures on documents reviewed by us and the legal capacity of natural
persons.

         Members of our firm are admitted to the bar of the State of California.
We express no opinion as to the laws of any jurisdiction, other than the laws of
the State of California.

         Based upon and subject to the foregoing, we are of the opinion that,
the Issued Shares are validly issued, fully paid and non-assessable.




         We hereby consent to the filing of this opinion as an exhibit to the
Registration Statement and to the reference to our firm under the caption "Legal
Matters" in the Prospectus forming a part of the Registration Statement. In
giving this consent, we do not thereby admit that we are within the category of
persons whose consent is required under Section 7 of the Securities Act or the
rules and regulations of the SEC promulgated thereunder.



                                             Very truly yours,

                                             /s/ McDermott, Will & Emery