-----BEGIN PRIVACY-ENHANCED MESSAGE----- Proc-Type: 2001,MIC-CLEAR Originator-Name: webmaster@www.sec.gov Originator-Key-Asymmetric: MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB MIC-Info: RSA-MD5,RSA, OisbLg062itB1DlWoMrURTEBKqfywd70zS2WA2CFGF4ZhUGxequ1xLOTQNQWHkW7 JgzLlh9icFqFdfyEhxmoSA== 0000898430-97-002461.txt : 19970610 0000898430-97-002461.hdr.sgml : 19970610 ACCESSION NUMBER: 0000898430-97-002461 CONFORMED SUBMISSION TYPE: 10-K/A PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 19961231 FILED AS OF DATE: 19970606 SROS: NASD FILER: COMPANY DATA: COMPANY CONFORMED NAME: TRIKON TECHNOLOGIES INC CENTRAL INDEX KEY: 0000868326 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 954054321 STATE OF INCORPORATION: CA FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 10-K/A SEC ACT: 1934 Act SEC FILE NUMBER: 000-26482 FILM NUMBER: 97620343 BUSINESS ADDRESS: STREET 1: 9255 DEERING AVE STREET 2: 222 W. ORANGE GROVE AVE CITY: CHATSWORTH STATE: CA ZIP: 91311 MAIL ADDRESS: STREET 1: 9255 DEERING AVENUE STREET 2: 9255 DEERING AVENUE CITY: SACHATSWORTH STATE: CA ZIP: 91311 FORMER COMPANY: FORMER CONFORMED NAME: PLASMA & MATERIALS TECHNOLOGIES INC DATE OF NAME CHANGE: 19950713 10-K/A 1 FORM 10-K/A - ------------------------------------------------------------------------------- - ------------------------------------------------------------------------------- UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 ---------------- FORM 10-K/A (Amendment No. 1) [X] ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 [_] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 1996 Commission File Number: 0-26482 ---------------- TRIKON TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) California 95-4054321 (State or other jurisdiction of (I.R.S. Employer Identification No.) incorporation or organization) 9255 Deering Avenue, Chatsworth, California 91311 (Address of principal executive offices) (818) 886-8000 (Registrant's telephone number, including area code) PLASMA & MATERIALS TECHNOLOGIES, INC. (Former name, if changed since last report) ---------------- Securities registered pursuant to Section 12(b) of the Act: None Securities registered pursuant to Section 12(g) of the Act: Common Stock, No Par Value ---------------- Indicate by check mark whether the Registrant: (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days. Yes [X] No [_] Indicate by check mark if disclosure of delinquent filers pursuant to Item 405 of Regulation S-K is not contained herein, and will not be contained, to the best of Registrant's knowledge, in definitive proxy or information statements incorporated by reference in Part III of this Form 10-K or any amendment to this Form 10-K. [_] The aggregate market value of the Common Stock held by non-affiliates of the Registrant on March 31, 1997, based on the closing price of the Common Stock as reported by the Nasdaq National Market on such date, was approximately $86,920,484. Shares of Common Stock held by each officer and director and by each person who owns 5% or more of the outstanding Common Stock have been excluded from this computation in that such persons may be deemed to be affiliates. This determination of affiliate status is not necessarily a conclusive determination for other purposes. As of March 31, 1997, the Registrant had outstanding 14,368,045 shares of Common Stock. DOCUMENTS INCORPORATED BY REFERENCE None - ------------------------------------------------------------------------------- - ------------------------------------------------------------------------------- The Registrant hereby amends Item 1 of Part I of its Annual Report on Form 10-K for the Fiscal Year Ended December 31, 1996, as set forth below, in order to correct the Company's backlog as of December 31, 1996, from an erroneously reported $23.5 million to $21.5 million. PART I This Annual Report on Form 10-K contains forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended (the "Securities Act"), and Section 21E of the Securities Exchange Act of 1934, as amended (the "Exchange Act"). These statements are in "Item 1. Business" in paragraph 4 under "--Products--Planar 200 Flowfill(TM)," paragraph 3 under "-- Customers," paragraph 8 under "--Research, Development and Engineering," paragraph 4 under "--Joint Development Agreements," and the paragraph under "--Environmental Matters." Such statements can also be found under "Item 7. Management's Discussion and Analysis of Financial Condition and Results of Operations of Trikon" in paragraphs 3 and 4 under "--Overview," paragraphs 2, 3, 5, 8 and 9 under "--Results of Operations" and paragraphs 7, 10 and 12 under "--Liquidity and Capital Resources." In addition, such statements can be found in paragraph 2 under "Item 7. Management's Discussion and Analysis of Financial Condition and Results of Operations of Electrotech--Administrative Expenses." Forward-looking statements may also be found in various sections of this Annual Report on Form 10-K that are not specifically set forth above. Actual results could differ materially from those projected in the forward- looking statements as a result of a number of factors, including those set forth herein. ITEM 1. BUSINESS INTRODUCTION Trikon Technologies, Inc., formerly Plasma & Materials Technologies, Inc. (together with its subsidiaries, "Trikon" or the "Company"), designs, manufactures and markets advanced high density, low pressure plasma sources, process modules and plasma processing systems, and develops, manufactures, markets and services semiconductor fabrication equipment for the worldwide semiconductor manufacturing industry. These products are used for etch, physical vapor deposition (PVD, which is commonly referred to as "sputtering") and chemical vapor deposition (CVD) applications and are sold to semiconductor manufacturers worldwide. Trikon currently offers a modular line of etch equipment which utilizes the Company's patented MORI(TM) source technology for polysilicon and metal etch applications in the fabrication of semiconductor devices and other products for the etch market, including its Omega(TM) Inductively Coupled Plasma (ICP) system. In addition, semiconductor manufacturers use the Company's patented MORI(TM) source technology for plasma CVD of silicon dioxide films and photoresist stripping. Certain other manufacturers also use the MORI(TM) source for the plasma etching of films in the fabrication of large area active matrix liquid crystal displays. Some of the customers that have purchased or have placed orders for the Company's plasma processing systems include Texas Instruments, Dallas Semiconductor, LG Semicon, Hyundai, Samsung, Toshiba and Canon Sales. Trikon also offers new leading-edge products including the Sigma sputter system for PVD, with optional Forcefill(TM) module, and the Planar 200 Flowfill(TM) system for inter-metal dielectric CVD. Forcefill(TM) technology allows manufacturers to eliminate the use of multistep CVD tungsten-plug based metallization processes and to utilize an entirely aluminum-based PVD multi-level metal scheme in sub- 0.5 micron Integrated Circuit (IC) manufacturing. Trikon's new CVD process technology, Flowfill(TM), forms high quality silicon dioxide layers which possess the properties of both gap fill and planarization. RECENT DEVELOPMENTS Electrotech Acquisition. On November 15, 1996, Trikon acquired all the issued and outstanding shares (the "Acquisition") of Electrotech Limited and Electrotech Equipments Limited (collectively, "Electrotech"). Electrotech develops, manufactures, markets and services semiconductor fabrication equipment for the worldwide semiconductor manufacturing industry. The aggregate purchase price paid by the Company in the Acquisition, excluding $7,976,995 in acquisition costs, was $145,700,000 consisting of $75,000,000 paid in cash and the issuance of 5,600,000 shares of common stock of the Company ("Common Stock") with an estimated fair market value of $70,700,000, based on the last sales price for the Common Stock on the day prior to the public announcement of the parties agreement to the terms of the Acquisition. Following consummation of the Acquisition, Christopher D. Dobson, former majority owner of Electrotech, and Nigel Wheeler, former President of Electrotech, became the Chairman of the Board of Directors, and President and Chief Operating Officer, respectively, of the Company. Unless the context otherwise requires, all references herein to "Trikon" or the "Company" include Electrotech with respect to all periods on and after November 15, 1996. 1 Name Change. On March 31, 1997, the Company changed its name to Trikon Technologies, Inc. The Company believes that the Trikon name better suits a company with a multi-continent presence and a number of non-plasma based products. PRODUCTS Trikon offers a line of modular solutions which are designed to meet the varying requirements of its customers for etching of polysilicon, metal and oxide films, stripping of photoresist, metal deposition and CVD of oxide films. Trikon's line of equipment includes the MORI(TM) plasma source, the MORI(TM) stand-alone process module for etch, strip or CVD applications, the PINNACLE 8000/*/ system and the PINNACLE 8000R(TM) system. In addition, the Electrotech-originated product line includes the Sigma Forcefill(TM) system, the Delta 201 system, the Planar 200 Flowfill(TM) system and the Omega(TM) 201-2 system. ETCH PINNACLE 8000/*/ and PINNACLE 8000R(TM) In December 1995, Trikon introduced its PINNACLE 8000R(TM) cluster tool platform, a more compact version of its existing PINNACLE 8000* system, that includes certain additional features that enable increased ease in operation. Each of Trikon's PINNACLE 8000/*/ and PINNACLE 8000R(TM) systems is a dual wafer cassette, vacuum loadlocked cluster tool which can incorporate up to four MESC-compatible process modules. The dual wafer cassette loadlock configuration enables the system to continuously process wafers. System throughput varies, and is primarily dependent on the film application, the operating configuration and the number of process modules attached to the system. For a typical polysilicon etch process, with each process module performing the same process, throughput varies from 40-60 wafers per hour for a two module configuration, to 70-90 wafers per hour for a four module configuration. This compares to a throughput of 30-40 wafers per hour for competitive two module systems. Floorspace required for a PINNACLE 8000R(TM) is approximately 44 square feet with two process modules and 65 square feet with four process modules. By comparison, floorspace required for a Pinnacle 8000/*/ is approximately 88 square feet with four process modules. List prices for the PINNACLE 8000/*/ and PINNACLE 8000R(TM) currently range from $1,800,000 for a standard two module system to $2,800,000 for a four module system, and from $1,900,000 for a standard two module system to $3,400,000 for a four module system, respectively. MORI(TM) Trikon's MORI(TM) plasma source is also sold as a subsystem on a limited geographic and application basis to OEM licensees of Trikon's MORI(TM) technology. Trikon currently sells the MORI(TM) source to Leybold of Germany for incorporation into Leybold's systems that are sold worldwide for etching large area, active matrix liquid crystal displays. Trikon sells its MORI(TM) source to Canon Sales for incorporation into Canon Sales' systems for photoresist stripping that are sold in the Japanese and Korean markets, and to NEC Anelva for incorporation into NEC Anelva's systems for metal and oxide etching that are sold in the Japanese market. Trikon's stand-alone process module, common to Trikon's PINNACLE 8000/*/ and PINNACLE 8000R(TM) systems, incorporates the MORI(TM) plasma source and can be configured for etch, strip or CVD applications. The process module can be sold to customers either to increase the capacity of existing system platforms, or to provide additional process capability. List price for a standard process module configured for etch applications is currently $500,000. 2 Omega(TM) 201-2 Trikon's Omega(TM) 201-2 metal etch system integrates the field-proven 200- series hardware as used on other current Trikon products with Trikon's ICP technology. Although mainly targeted at metal interconnect, the technology is also able to address oxide and polysilicon etch and is compatible with all etch applications. The Omega(TM) 201-2 metal etch system has been designed to address the special requirements of metal etch while minimizing the space utilized in the clean room. The system has a passivation unit which minimizes post-etch corrosion by combining the use of a downstream plasma with radiant heating of the wafer backside to maximize photoresist strip rates and drive off involatile chlorine-containing materials. The Omega(TM) 201-2 also has a wafer temperature control system which ensures that etch residues are minimized and often eliminates the need to harden the photoresist using a deep UV process. The price for Trikon's Omega(TM) etch system ranges from approximately $700,000 to approximately $1,400,000, depending on the configuration of the system. Physical Vapor Deposition Sigma Layers of metal alloys can be deposited by Trikon's Sigma product line, a sputtering machine with multiple process chambers. This product deposits a very thin uniform layer of interconnect metal on the whole surface of the semiconductor wafer. Subsequent lithography and etching turns this layer into an intricate pattern of interconnect wiring on the many individual semiconductor devices, each a complex and integrated functioning circuit. Sigma is designed to be one of the cleanest PVD systems on the market, with particular application in multi-layer metallization. Trikon's strategy is to offer semiconductor manufacturers, who are currently using 0.8 micron to 1.0 micron design rules, a way to avoid the adoption of CVD tungsten, a relatively difficult, dirty and expensive process. Trikon offers system configurations which bridge the gap from non-hole-fill technology, at approximately 1.0 micron, to the adoption of Trikon's Forcefill(TM) technology onto the Sigma platform, which is capable of filling holes smaller than 0.25 micron. The selling price for the Sigma system ranges from approximately $1.5 million to approximately $2.5 million, depending on the configuration of the system. Sigma Forcefill(TM) The Sigma Forcefill(TM) system is being developed to extend Trikon's standard Sigma metallization product capability into the sub-0.5 micron market. The Forcefill(TM) technology is used with traditional aluminum techniques and eliminates the relatively complicated and difficult use of tungsten. The process can be carried out on a standard Sigma series system with an attached Forcefill(TM) module, which involves depositing a layer of aluminum such that it forms a bridge over the holes. When adequate bridging is achieved, the wafer is transferred under vacuum to the Forcefill(TM) module where the aluminum is heated and forced under very high pressure into the hole, thus achieving a void-free fill. Forcefill(TM) allows manufacturers to eliminate the use of CVD tungsten and to utilize an entirely aluminum-based multi-level metal scheme. DRAM and logic applications are both target markets for Forcefill(TM), since the cost saving per layer is substantial, and the interconnect speed is improved. The average selling price of the Sigma Forcefill(TM) system ranges from approximately $3.5 million to approximately $4.0 million, depending on the configuration of the system. Sigma Forcefill(TM) products continue to be subject to customer review and evaluation and Trikon is presently applying considerable efforts to attain functionality and reliability levels acceptable to Trikon's target markets. 3 Chemical Vapor Deposition Planar 200 Flowfill(TM) The planarized intermetal dielectric market requires a suitable insulating material to protect the microscopic wiring in a chip, a number of which have various undesirable characteristics. The most common insulating material is silicon dioxide, which, when deposited by conventional techniques, is unable to fill the increasingly small gap spacing required by next generation ICs. Trikon has developed a new CVD process technology, Flowfill(TM), to form high quality silicon dioxide layers which possess the properties of both gap fill and planarization. In the Planar 200 Flowfill(TM) multi-chambered cluster system, the advanced planarization layer consists of three films which are deposited sequentially. The plasma CVD films are deposited in one module and the CVD planarizing flow layer is deposited in the Flowfill(TM) module with no vacuum breaks between the process steps. The flow layer has the ability to fill sub-micron features less than 0.2 micron wide, with a 5 to 1 height to width ratio, and achieve typical planarization of 80% for gaps up to 20 microns. Alternative technologies to Trikon's Flowfill(TM) system include spin on glass (SOG) and high density plasma (HDP) combined with chemical mechanical polishing (CMP). SOG is deposited in single or multiple spins. This technique is complex and slow due to the number of steps involved. In addition, although each individual step may be clean, the combination can lead to a high number of added particles, which can decrease yield. HDP gap fills a wafer with silicon dioxide in one system, but the rough spots on the wafer must be planarized using a CMP process in a second system. For a number of reasons, Trikon's initial shipments of the Planar 200 Flowfill(TM) have targeted the DRAM market. First, due to the competitive nature of the DRAM market, cost is a primary concern to DRAM manufacturers. Certain DRAM manufacturers have indicated that Flowfill(TM) will offer significant cost advantages for next generation DRAMs relative to both the SOG and HDP processes. Second, due to the circuit designs of a DRAM, the maximum distance between metal lines is 80 to 100 microns; Flowfill(TM) provides a high level of planarity for gaps of this size. The selling price for the Planar 200 Flowfill(TM) system ranges from approximately $1.4 million to approximately $2.5 million, depending on the configuration of the system. Flowfill(TM) systems continue to be subject to customer review and evaluation and Trikon is presently applying considerable efforts to attain functionality and reliability levels acceptable to Trikon's target market. In February 1997, the Company announced an advance in the depositing of low dielectric constant (low-k) materials used in IC layering and production using the Flowfill(TM) technologies (the "Flowfill(TM) CVD Development"). By lowering the dielectric constant, the speed of an IC increases. Trikon has tested a low-k material for use in its Flowfill(TM) system that mixes methylsilane gas with hydrogen peroxide to produce a high quality insulatory layer that is self-planarizing. While management believes that this low-k process is a significant advancement in the intermetal dielectric market, additional testing is necessary. There can be no assurance that this process will result in the successful manufacture and production of ICs. See Note 12 of Notes to Consolidated Financial Statements. Delta 201 Trikon's Delta 201 is a versatile, single-chamber production system for producing films, including silicon dioxide or silicon nitride. The films deposited by this system are used to insulate the interconnect wiring of a semiconductor wafer. The Delta 201 is a relatively low-cost system and its small dimensions make it attractive to customers, who are often short of cleanroom space. The Delta 201 also addresses the gallium arsenide semiconductor market and incorporates a wafer handling mechanism that is suited to handle fragile and high-cost gallium arsenide wafers. The average selling price for the Delta 201 system is approximately $600,000. 4 Customers The Company sells its systems to semiconductor manufacturers located throughout the United States, Europe, Asia/Pacific, Korea and Japan. The following is a list of customers who have purchased, leased or have current orders for Trikon products either directly with the Company or through its distribution and OEM relationships: AT&T LSI Logic Philips Daewoo Matsushita Ricoh Dallas Semiconductor Micron Technology Samsung Fujitsu Mitsubishi Sharp GEC Plessey Motorola Siemens Hitachi National Semiconductor Sony Hyundai NEC TEMIC IBM OKI Texas Instruments IC Works Olivetti Toshiba LG Semicon Orbit Semiconductor TriQuint Leybold Tower Semiconductor
Trikon's total revenue includes amounts from certain individual customers that exceed 10% of total revenue. Revenue from Hyundai and Siemens represents 19% and 12% of total revenue, respectively, for the year ended December 31, 1996. Revenue from five customers represented 19%, 15%, 12%, 11% and 11% each of total revenue for the year ended December 31, 1995 and revenue from six customers represented 19%, 17%, 17%, 15%, 15% and 12% each of total revenue for the ten months ended December 31, 1994. During the year ended December 31, 1995, sales to Alcan-Tech, Canon Sales and NEC Anelva in Japan, and to LG Semicon and Hyundai in Korea, accounted for 25% and 18% of the Company's total revenue, respectively, for that period. During the ten months ended December 31, 1994, sales to Canon Sales and NEC Anelva in Japan, and to Samsung and Hyundai in Korea, accounted for 31% and 32% of the Company's total revenue, respectively, for that period. The Company's operating results could be materially adversely affected by the loss of business from or the cancellation of orders by or decreases in the prices of products sold to these or other customers located in Germany, Japan and Korea. See Note 1 of Notes to Consolidated Financial Statements. Sales other than in the United States accounted for approximately 77%, 47% and 66% of total revenue in the years ended December 31, 1996 and 1995, and the ten months ended December 31, 1994, respectively. The Company anticipates that sales outside the United States will continue to account for a significant portion of its total revenue. In addition, with the acquisition of Electrotech, which sells primarily to international locations including Germany, Japan and Israel, the Company expects that sales to Japanese, Korean, and European semiconductor manufacturers will continue to represent a significant percentage of the Company's product sales through at least 1997. All export sales by the Company must be licensed by the Office of Export Administration of the U.S. Department of Commerce and related U.K. and other foreign agencies performing similar functions. Although Trikon has experienced no difficulty in obtaining these licenses, the Company's failure to obtain these licenses in the future could have a material adverse effect on Trikon's results of operations. A number of other risks arise in the international market place, including unexpected changes in regulatory requirements, exchange rates, tariffs and other barriers, political and economic instability, difficulties in accounts receivable collections, extended payment terms, the challenges of maintaining a readily available supply of spare parts, difficulties in managing distributors or representatives, difficulties in staffing and managing foreign subsidiary operations, potentially adverse tax consequences, and the fluctuation of foreign currency exchange rates. Wherever possible, international sales of Trikon's products are denominated in U.S. dollars in order to reduce the risks associated with such currency 5 fluctuation. There can be no assurance that the Company will be able to avoid these and other risks relating to the conduct of business internationally. Marketing, Sales and Customer Support Trikon's long range goal is to market its products and services directly to all end use customers to the extent it is efficient and cost effective. In the current stage of Trikon's growth, it is not efficient or cost effective to market products and services through a direct sales force in all regions. Consequently, Trikon has established multiple sales channels to market products and services to match Trikon's efforts in each region. Trikon currently markets and sells its products primarily through three separate sales channels, direct sales, distributor arrangements and OEM agreements. In selected regions and countries, Trikon uses a combination of direct sales, distributor arrangements, OEM agreements and sales representatives. As a result of the Acquisition, Trikon expanded its field sales and support organizations worldwide, focusing on marketing within each product division. The Company now has sales and marketing offices located in the United States, United Kingdom, Europe and Asia to enable sales and service personnel to provide dedicated worldwide support to new and existing customers. The field based sales, service, and applications personnel now report into a unified management structure based on country geography. This gains efficiency through cross training and critical mass for support. Sales staff now represent the full Trikon product line to its customers, gaining leverage in the selling cycle. In select international countries, Trikon will continue to use distributor or representative organizations for sales, but is moving to full direct support organizations for customer control and satisfaction. In the United States, Trikon markets and sells its products principally through its direct sales organization. In Korea, Trikon markets and sells its products direct through the sales staff of its wholly owned Korean subsidiary. The Korean market is served by a direct sales group in order to meet Korean semiconductor manufacturers' requirements of having direct local representation for sales, customer support and spare parts. In Hong Kong, Taiwan, Singapore and China, the Company has sales agents which has increased flexibility and responsiveness to customer needs in those areas. The European market is served by a direct sales group in the United Kingdom which offers sales, customer support and spare parts. Trikon currently believes that the most efficient strategy for penetrating the Japanese market is to have a distribution agreement with a well established and experienced sales organization. Trikon has appointed Canon Sales as its exclusive etch system distributor in Japan, and in July 1995 entered into a definitive agreement for such appointment. The agreement is year-to-year, renewable automatically unless either party terminates at least 90 days before the end of the year, and establishes the price to Canon as a specified percentage discount from Trikon's then-current published U.S. list price. Although management believes that it maintains a good relationship with Canon Sales, there can be no assurance that the relationship will continue. In addition, PVD and CVD sales in Japan are distributed through Innotech Corporation. Trikon has also set up a sales staff located at its wholly owned Japanese subsidiary to help establish its own experienced sales organization. In addition, Trikon has established a distributor relationship with Techlink for the Taiwan market. Trikon maintains active OEM agreements in Japan and Europe. Trikon currently sells the MORI(TM) source to Leybold of Germany for incorporation into Leybold's systems that are sold worldwide for etching large area, active matrix liquid crystal displays. Trikon sells its MORI(TM) source to NEC Anelva for incorporation into NEC Anelva's systems for metal and oxide etching which are sold in the Japanese market, and to Canon Sales for incorporation into Canon Sales' systems for photoresist stripping that are sold in the Japanese and Korean markets. Trikon believes that providing its customers with evaluation systems of its equipment products is critical to its sales efforts. The ability to evaluate Trikon's systems on a trial basis is expected by the semiconductor manufacturing customers to whom Trikon markets. The average duration of a trial period for systems is 6 approximately one year. Consequently, as Trikon expands its sales efforts, it believes that it will need to significantly increase its investment in demonstration and evaluation systems. The failure or inability of Trikon to convert a demonstration system placed with a customer to a final sale could have a material adverse effect on the Company. Trikon believes that high quality customer support, customer training, and field consultation are key components in a customer's decision in selecting a semiconductor equipment supplier. The ability to provide a processing system with a high degree of reliability, low cost, high yield, high uptime and high mean time between failure greatly influences a customer's purchase decision. This requires experienced, responsive local support with quality personnel and the ready availability of spare parts. Trikon believes that a focused field support organization that works closely with its customers provides invaluable feedback from customers with respect to system cost effectiveness, and typically results in technical advances through continuous design improvement. To further ensure customer satisfaction, Trikon also provides service and maintenance training as well as process application training for its customers' personnel on a fee basis. Trikon maintains an extensive inventory of spare parts which allows Trikon to provide overnight delivery for many parts. Research, Development and Engineering Trikon believes that its future success will depend, in part, upon its ability to continue to improve its systems and its process technologies and to develop new technologies and systems that compete effectively on the basis of total cost of ownership and performance. These technologies and systems will also need to meet customer requirements and emerging industry standards. Accordingly, Trikon devotes a significant portion of its personnel and the financial resources to research and development programs and seeks to maintain close relationships with its customers in order to remain responsive to their product needs. As of December 31, 1996, the Company employed 159 professional and technical personnel in research, development and engineering. These employees are organized in the following departments: research and development, hardware engineering, software engineering, customer specials engineering, systems engineering, documentation and manufacturing engineering, and customer applications. The research and development group is responsible for identifying new technology applications and developing processes to meet customer requirements. Major research and development programs currently address PVD and CVD applications, polysilicon and integrated stack etch applications, metal etch applications, including aluminum, and oxide etch applications. Research and development activities for the Company is run by a general manager of each of the two product divisions. The etch division, which is managed by a U.S. based general manager, conducts most its development activities in Chatsworth, California. There are approximately 55 individuals currently engaged in research and development activities for the etch division, 46 of which work in the U.S. and nine of which work in the UK. The deposition division is managed by a United Kingdom based General Manager. Research and development activities for the deposition division are conducted in the United Kingdom with peripheral support by U.S. personnel. There are 104 individuals in the U.K. engaged in research in the deposition division. Coordination of research and development activities for both the etch and deposition product divisions is managed by Nigel Wheeler, the President and Chief Operating Officer of Trikon, who resides in the United Kingdom. In addition, the etch and deposition divisions are run as separate profit centers with each General Manager having profit and loss responsibility for their respective operations. Trikon's research, development and engineering expenses were $10.1 million, $4.6 million and $3.6 million for the years ended December 31, 1996 and 1995, and the ten months ended December 31, 1994, respectively, and 7 represented 24.0%, 21.5% and 41.2% of total revenue for these three periods, respectively. In addition to direct research and development expenses, the Company recognized a one-time charge of $86.0 million for acquisition related in-process research and development, in the year ended December 31, 1996, due to the Acquisition. In addition to the Company's direct research, development and engineering expenses, significant expenditures in research, development and engineering have been made by Leybold, Canon Sales and NEC Anelva, with whom the Company has entered into OEM agreements. These arrangements provide the Company with expanded resources and knowledge to broaden the use of Trikon's MORI(TM) plasma technology in the etch, PVD and CVD markets. No information on the amount of these expenditures has been disclosed to the Company, however, the Company believes that total expenditures exceed the Company's direct expenditures for the same applications over the same periods identified above. Although Trikon believes that it has allocated sufficient resources to its research, development and engineering efforts, the success of new system introductions is dependent on a number of factors, including timely completion of new system designs and market acceptance. There can be no assurance that the Company will be able to improve its existing systems and process technologies or develop new technologies or systems. In addition, the Company may incur substantial unanticipated costs to establish the functionality and reliability of its future product introductions early in the product's life cycle. Joint Development Arrangements In April 1996, Trikon entered into an agreement with NEC Anelva to jointly develop a high density plasma dielectric CVD system. Pursuant to the agreement, the two companies intended to jointly develop, market, and manufacture such CVD system based upon Trikon's MORI(TM) source. As a result of the Flowfill(TM) CVD Development, the Company and NEC Anelva have jointly determined to discontinue their joint development effort in this area. On March 29, 1996, Trikon entered into a number of agreements with PMT CVD Partners, L.P. (the "CVD Partnership") and the limited partners thereof (the "Limited Partners"). The CVD Partnership was sponsored by Trikon to fund research and development costs and expenses relating to CVD technology and applications using MORI(TM) source technology. An aggregate of approximately $5,350,000 was invested by the Limited Partners in the CVD Partnership to fund such research and development efforts, which were performed by Trikon under an agreement with the CVD Partnership. Trikon has been paid for such services in an amount equal to its actual direct costs, as defined, plus a stated percentage of such costs. During the year ended December 31, 1996, the amount of such research and development payments to Trikon by the CVD Partnership was $2,841,427. Under the applicable agreement, Trikon is obligated to pay stated royalties to the CVD Partnership on sales of developed CVD products, and the royalty percentage will vary based on the geographic location of the sale. In connection with the Flowfill(TM) CVD Development, the Company announced that it would henceforth focus all of its CVD resources to further evaluate and develop products based on the Flowfill(TM) technology. In that regard, Trikon advised the Limited Partners that it had decided to discontinue the research and development efforts of the CVD Partnership. One of the Limited Partners has indicated that it believes such action was inconsistent with the terms of the research and development agreement entered into between the Company and the CVD Partnership, and that, accordingly, a settlement of any and all claims that the Limited Partners may have in connection with such discontinuance is appropriate. The parties have had only preliminary discussions regarding the resolution of this dispute, though all funding by the CVD Partnership of MORI(TM) source-based CVD research and development has been discontinued. See Notes 6 and 12 to Consolidated Financial Statements. Trikon and LG Semicon have agreed to jointly develop an oxide etch process utilizing Trikon's PINNACLE 8000R(TM) cluster tool. Trikon's wholly owned Korean subsidiary will manage the process development work, which will be conducted at LG Semicon's Cheong-Ju research and development facility in South Korea and at Trikon's 8 headquarters in California. Trikon believes that this joint development project will help Trikon's PINNACLE 8000R(TM) system achieve acceptance in the oxide etch market. Although management believes that it maintains a good relationship with LG Semicon, there can be no assurance that the relationship will remain positive, or that the joint development project will be successfully completed. In the event of a termination of Trikon's agreement with LG Semicon, or the failure by the parties to successfully develop an oxide etch process based on Trikon's PINNACLE 8000R(TM) cluster tool, Trikon's ability to penetrate the oxide etch market would be adversely affected. Manufacturing In order to maintain close control of its manufacturing processes, Trikon's deposition division operates in a vertically integrated manner at the Company's South Wales facility, taking full responsibility for the manufacturing of virtually all components for Trikon's systems. This approach has enabled the Company to ensure quality control and reduce dependence on third party suppliers for its PVD and CVD products. On the other hand, the manufacturing operations of Trikon's etch division, located in Chatsworth, California, is a horizontally integrated structure consisting of materials planning and procurement, assembly, system integration and final test. Trikon's modular product line, which is designed around the SEMI MESC industry standard, enables the Company to use a large number of components and sub-assemblies which are common not only to the Company's product line but also to systems manufactured by other companies in the industry, both competitive and non-competitive. Examples of common sub-assemblies are wafer aligners and vacuum cassette elevators obtained from Brooks Automation in Massachusetts, and RF power supplies obtained from RF Power Products in New Jersey. Examples of sub-assemblies obtained from outside suppliers that are unique to the Company's systems products include gas box assemblies and fabricated vacuum chambers. Trikon's Chatsworth, California operations rely on outside suppliers to manufacture substantially all of the components and a portion of sub- assemblies used in their plasma processing systems. Certain of these are obtained from a sole supplier or a limited group of suppliers. For example, the wafer cassette elevator load locks used in the Company's PINNACLE 8000/*/ and PINNACLE 8000R(TM) plasma processing systems are sole sourced from Brooks Automation. The Company relies on outside suppliers generally, and a sole or limited group of suppliers an adequate supply of required components, as well as reduced control over pricing and timely delivery of components. Because the manufacture of certain of these components and sub-assemblies is a complex process and can require long lead times, there can be no assurance that delays or shortages caused by suppliers will not occur. Any inability to obtain adequate deliveries or any other circumstance that would require the Company to seek alternate sources of supply or to manufacture such components internally could delay the Company's ability to ship its systems and could have a materially adverse effect on the Company. Competition The markets served by Trikon's products are highly competitive and subject to rapid technological change. Significant competitive factors include system performance, cost of ownership (which is dependent upon yield, throughput and reliability), size of installed base, depth and breadth of product line and customer support. Trikon faces significant competition from various suppliers of systems that utilize alternative technologies, including other manufactures of HDP systems. In the etch market, the Company faces competition from suppliers of reactive ion etch (RIE) systems, including Applied Materials, Lam Research and Tokyo Electron. Trikon's MORI(TM) based etch systems also face competition from ICP based etch systems marketed by Applied Materials and Lam Research, as well as the electron cyclotron resonance (ECR) based etch system marketed by Hitachi. In the high density plasma CVD market, Trikon's primary competitors are Applied Materials, Novellus and Lam Research. In the PVD market, Trikon's Forcefill(TM) technology faces competition from suppliers of aluminum and tungsten-plug PVD systems, such as Applied Materials, and a number of other competitors, including NEC Anelva, MRC, 9 Novellus, Varian and Ulvac. Trikon's Flowfill(TM) technology faces competition from other CVD manufacturers, including Applied Materials, Lam Research, Novellus and Watkins-Johnson. Virtually all of the Company's primary competitors are substantially larger companies with broader product lines, and have well established reputations in the etch, PVD, CVD and SOG markets, longer operating histories, greater experience with high volume manufacturing, broader name recognition, substantially larger customer bases, and substantially greater financial, technical, manufacturing and marketing resources than the Company. Trikon also faces potential competition from new entrants in the market, including established manufacturers in other segments of the semiconductor capital equipment market, who may decide to diversify into the Company's market segment. There can be no assurance that Trikon's competitors will not develop enhancements to or future generations of competitive products that will offer price and performance features that are superior to those offered by the Company's systems. Intellectual Property Trikon relies on a variety of types of intellectual property protection to protect its proprietary technology, including patent, copyright, trademark and trade secret laws, non-disclosure agreements, and other intellectual property protection methods. Although the Company believes that its patents and trademarks may have value, the Company believes that its future success will also depend on the innovation, technical expertise and marketing abilities of its personnel. The Company currently holds eleven patents in the United States, two patents in the United Kingdom, two patents in Taiwan, one patent in each of Germany, France, Italy and the Netherlands. The Company currently has approximately 49 patent applications pending worldwide and intends to file additional patent applications, as appropriate. The Company's patents and patent applications pending are all in the field of semiconductor manufacture and are predominantly concerned with inductively coupled plasma etching (ICP), deposition of dielectric layers by plasma and thermal means and in particular to Trikon's MORI(TM) plasma source, the global planarization by a dielectric film (Flowfill(TM)) and the process of filling semiconductor contact holes by deformation of interconnect metal by high pressure (Forcefill(TM)) and the equipment related to these processes. The Company also holds a copyright on its MACSE(TM) proprietary software. The Company also has five trademarks that are registered with the United States patent and trademark office, including PINNACLE 8000/*/ and PINNACLE 8000R(TM) and uses a number of trademarks that are registered or for which an application for registration has been filed in the United States and certain other countries, including Forcefill(TM) and Flowfill(TM). There can be no assurance that patents will be issued on the pending applications or that competitors will not be able to legitimately ascertain proprietary information embedded in the Company's products which is not covered by patent or copyright. In such case, the Company may be precluded from preventing the competitor from making use of such information. In addition, should the Company wish to assert its patent rights against a particular competitor's product, there can be no assurance that any claim in a Company patent will be sufficiently broad nor, if sufficiently broad, any assurance that the Company's patent will not be challenged, invalidated or circumvented, or that the Company will have sufficient resources to prosecute its rights. The Company's policy is to vigorously protect and defend its patents, trademarks and trade secrets. The Company has abandoned its ICP patent in Europe and does not intend to renew the related patents in the United States. Trikon is opposing an issued German patent held by a competitor which relates to a process similar to Forcefill(TM). The Company's management and its advisors believe this patent is too broadly worded and as presently worded there is some possibility that an infringement by Trikon might be alleged. There can be no assurance as to the outcome of these proceedings. The Company's involvement in any patent or other intellectual property dispute or in any action to protect trade secrets and know-how, even if successful, could have a material adverse effect on the Company and its business. Adverse determinations in any such action could subject the Company to significant liabilities, require the Company to seek licenses from third parties, which might not be available, and possibly prevent the Company 10 from manufacturing and selling its products, any of which could have a material adverse effect on the Company and its business. Environmental Matters The Company is subject to a variety of federal, state and local laws, rules and regulations relating to the use, storage, discharge and disposal of hazardous chemicals and gases used during its customer demonstrations and in research and development activities. Public attention has increasingly been focused on the environmental impact of operations which use hazardous materials. In 1995, the United Kingdom adopted a new and comprehensive environmental law known as the Environmental Act of 1995 (the "Environmental Act"), which, among other things, deals with the allocation of responsibility for the cleanup of contaminated property and expands potential liability with respect to the remediation of such contamination. Trikon owns or leases a number of facilities in the United Kingdom, and compliance with the Environmental Act is anticipated to result in certain expenses. A reserve of $435,000 for the estimated potential liability of these expenses has been recorded in connection with the Acquisition. There can be no assurance that such expenses will not exceed present estimates. Failure to comply with present or future regulations could result in substantial liability to the Company, suspension or cessation of the Company's operations, restrictions on the Company's ability to expand at its present locations, or requirements for the acquisition of significant equipment or other significant expense. To date, compliance with environmental rules and regulations has not had a material effect on the Company's operations. At the present time, the Company believes that it is in material compliance with all applicable environmental rules and regulations. Backlog As of December 31, 1996, the Company's backlog was $21.5 million, as compared to $8.7 million at December 31, 1995. The Company's backlog at December 31, 1996 consisted primarily of orders for its PVD, CVD and etch products, a substantial majority of which consisted of Electrotech products. The Company includes in its backlog all purchase orders that provide for delivery within twelve months. The Company's business is characterized by large purchase contracts for standard products with related customized options. All orders are subject to cancellation or delay by the customer with limited or no penalty. Because of possible changes in delivery schedules and cancellations of orders, the Company's backlog at any particular date is not necessarily representative of actual sales for any succeeding periods. Employees At December 31, 1996, the Company had 678 regular employees, including 159 engaged in research, development and 44 in sales and marketing, 171 in customer support, 255 in manufacturing, and 49 in general administration and finance. In March 1997, the Company announced an approximate 8% workforce reduction affecting all such employee groups. The Company believes its future success will depend in large part on its ability to attract and retain highly skilled employees, particularly those highly skilled design, process and test engineers involved in the manufacture of existing systems and the development of new systems and processes. The competition for such personnel is intense. The Company faces the task of quickly identifying, recruiting, training and integrating new employees. There can be no assurances that the Company will be successful in doing so or, if successful, in retaining such employees. None of the employees of the Company are covered by a collective bargaining agreement, and the Company has not entered into employment agreements with any of its employees, with the exception of a three-year employment agreement entered into with Nigel Wheeler, the Company's President and Chief Operating Officer, as of November 15, 1996. The Company considers its relationships with its employees to be good. 11 Financial Information Relating to Foreign and Domestic Operations and Export Sales See Note 3 of Notes to Consolidated Financial Statements. SIGNATURES ---------- Pursuant to the requirements of Section 13 or 15(d) of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized. Date: June 3, 1997 Trikon Technologies, Inc. By: /s/ John W. LaValle ------------------- John W. LaValle Senior Vice President, Chief Financial Officer and Secretary
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