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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 VdjSh/dWVT+zIjFDW7jMZtHqIffEgt7zfC7wkcWtDifOV4dYqGtiFd7amGgIBvgt
 iO+n86U04LeG6JMq+632Ww==

<SEC-DOCUMENT>0001323953-09-000013.txt : 20091118
<SEC-HEADER>0001323953-09-000013.hdr.sgml : 20091118
<ACCEPTANCE-DATETIME>20091118160550
ACCESSION NUMBER:		0001323953-09-000013
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20091117
FILED AS OF DATE:		20091118
DATE AS OF CHANGE:		20091118

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Moses Robert G
		CENTRAL INDEX KEY:			0001413431

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-51072
		FILM NUMBER:		091193450

	MAIL ADDRESS:	
		STREET 1:		RGM CAPITAL, LLC
		STREET 2:		6621 WILLOW PARK DRIVE SUITE ONE
		CITY:			NAPLES
		STATE:			FL
		ZIP:			34109

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			CASCADE MICROTECH INC
		CENTRAL INDEX KEY:			0000864559
		STANDARD INDUSTRIAL CLASSIFICATION:	INSTRUMENTS FOR MEAS & TESTING OF ELECTRICITY & ELEC SIGNALS [3825]
		IRS NUMBER:				000000000
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		2430 NW 206TH AVENUE
		CITY:			BEAVERTON
		STATE:			OR
		ZIP:			97005
		BUSINESS PHONE:		5036011000

	MAIL ADDRESS:	
		STREET 1:		2430 NW 206TH AVENUE
		CITY:			BEAVERTON
		STATE:			OR
		ZIP:			97006

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			RGM Capital, LLC
		CENTRAL INDEX KEY:			0001323953
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1204

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-51072
		FILM NUMBER:		091193451

	BUSINESS ADDRESS:	
		STREET 1:		6621 WILLOW PARK DRIVE
		STREET 2:		SUITE ONE
		CITY:			NAPLES
		STATE:			FL
		ZIP:			34109
		BUSINESS PHONE:		239-593-1280

	MAIL ADDRESS:	
		STREET 1:		6621 WILLOW PARK DRIVE
		STREET 2:		SUITE ONE
		CITY:			NAPLES
		STATE:			FL
		ZIP:			34109
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0303</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2009-11-17</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000864559</issuerCik>
        <issuerName>CASCADE MICROTECH INC</issuerName>
        <issuerTradingSymbol>CSCD</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001323953</rptOwnerCik>
            <rptOwnerName>RGM Capital, LLC</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>6621 WILLOW PARK DRIVE</rptOwnerStreet1>
            <rptOwnerStreet2>SUITE ONE</rptOwnerStreet2>
            <rptOwnerCity>NAPLES</rptOwnerCity>
            <rptOwnerState>FL</rptOwnerState>
            <rptOwnerZipCode>34109</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001413431</rptOwnerCik>
            <rptOwnerName>Moses Robert G</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>RGM CAPITAL, LLC</rptOwnerStreet1>
            <rptOwnerStreet2>6621 WILLOW PARK DRIVE SUITE ONE</rptOwnerStreet2>
            <rptOwnerCity>NAPLES</rptOwnerCity>
            <rptOwnerState>FL</rptOwnerState>
            <rptOwnerZipCode>34109</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common stock, $0.01 par value per share</value>
            </securityTitle>
            <transactionDate>
                <value>2009-11-17</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>S</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionTimeliness>
                <value></value>
            </transactionTimeliness>
            <transactionAmounts>
                <transactionShares>
                    <value>116800</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>5.0803</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>1432584</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>By private limited parnetships and a separately managed account</value>
                    <footnoteId id="F1"/>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">This Form 4 is filed jointly by Robert G. Moses and RGM Capital, LLC (&quot;RGM&quot;). Robert G. Moses and RGM are deemed to be 10% beneficial owners of the Issuer. The securities reported on this Form 4 are either held in the name of private investment limited partnerships, of which RGM is the general partner, or in the name of a separately managed account for which RGM is investment manager. By virtue of his position as the managing member of RGM, Mr. Moses may be deemed to  beneficially own the securities reported in this Form 4.  Mr. Moses and RGM each disclaim beneficial ownership of the reported securities except to the extent of his or its pecuniary interest therein, and this report shall not be deemed an admission that Mr. Moses or RGM is the beneficial owner of the securities for purposes of Section 16 of the Securities Exchange Act of 1934, as amended, or for any other purpose.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>Robert G. Moses on behalf of RGM Capital, LLC</signatureName>
        <signatureDate>2009-11-18</signatureDate>
    </ownerSignature>

    <ownerSignature>
        <signatureName>Robert G. Moses</signatureName>
        <signatureDate>2009-11-18</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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