-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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<SEC-DOCUMENT>0001104659-07-033547.txt : 20070430
<SEC-HEADER>0001104659-07-033547.hdr.sgml : 20070430
<ACCEPTANCE-DATETIME>20070430181311
ACCESSION NUMBER:		0001104659-07-033547
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20070427
FILED AS OF DATE:		20070430
DATE AS OF CHANGE:		20070430

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			McFadden Bruce
		CENTRAL INDEX KEY:			0001311556

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-51072
		FILM NUMBER:		07802453

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		(503) 601-1000

	MAIL ADDRESS:	
		STREET 1:		2430 N.W. 206TH AVENUE
		CITY:			BEAVERTON
		STATE:			OR
		ZIP:			97006

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			CASCADE MICROTECH INC
		CENTRAL INDEX KEY:			0000864559
		STANDARD INDUSTRIAL CLASSIFICATION:	INSTRUMENTS FOR MEAS & TESTING OF ELECTRICITY & ELEC SIGNALS [3825]
		IRS NUMBER:				000000000
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		2430 NW 206TH AVENUE
		CITY:			BEAVERTON
		STATE:			OR
		ZIP:			97005
		BUSINESS PHONE:		5036011000

	MAIL ADDRESS:	
		STREET 1:		2430 NW 206TH AVENUE
		CITY:			BEAVERTON
		STATE:			OR
		ZIP:			97006
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>a4.xml
<DESCRIPTION>4
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2007-04-27</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000864559</issuerCik>
        <issuerName>CASCADE MICROTECH INC</issuerName>
        <issuerTradingSymbol>CSCD</issuerTradingSymbol>
    </issuer>

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            <rptOwnerName>McFadden Bruce</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>2430 N.W. 206TH AVENUE</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>BEAVERTON</rptOwnerCity>
            <rptOwnerState>OR</rptOwnerState>
            <rptOwnerZipCode>97006</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>VP Corporate Development</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

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                <value>Common Stock</value>
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            <transactionDate>
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                <transactionAcquiredDisposedCode>
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                <value>Common Stock</value>
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            <transactionDate>
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                <transactionFormType>4</transactionFormType>
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                <equitySwapInvolved>0</equitySwapInvolved>
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            <transactionTimeliness>
                <value></value>
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            <transactionAmounts>
                <transactionShares>
                    <value>100</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>13.03</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
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            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>64238</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
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                </directOrIndirectOwnership>
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        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
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            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>S</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
                <footnoteId id="F4"/>
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            <transactionTimeliness>
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            </transactionTimeliness>
            <transactionAmounts>
                <transactionShares>
                    <value>600</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>13.05</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>63638</value>
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                </transactionShares>
                <transactionPricePerShare>
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                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
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            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>62838</value>
                </sharesOwnedFollowingTransaction>
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            <transactionDate>
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            </transactionDate>
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            <transactionAmounts>
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                </transactionShares>
                <transactionPricePerShare>
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                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
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                <sharesOwnedFollowingTransaction>
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            <transactionAmounts>
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                <transactionAcquiredDisposedCode>
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                </directOrIndirectOwnership>
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        </nonDerivativeTransaction>
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    <derivativeTable>
        <derivativeTransaction>
            <securityTitle>
                <value>Option to purchase Common Stock</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>3.10</value>
            </conversionOrExercisePrice>
            <transactionDate>
                <value>2007-04-27</value>
            </transactionDate>
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                <transactionFormType>4</transactionFormType>
                <transactionCode>M</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionTimeliness>
                <value></value>
            </transactionTimeliness>
            <transactionAmounts>
                <transactionShares>
                    <value>5000</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>3.10</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
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            <exerciseDate>
                <value>2002-11-19</value>
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            <expirationDate>
                <value>2007-11-19</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
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                <underlyingSecurityShares>
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                </underlyingSecurityShares>
            </underlyingSecurity>
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                <sharesOwnedFollowingTransaction>
                    <value>5000</value>
                </sharesOwnedFollowingTransaction>
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            <ownershipNature>
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                    <value>D</value>
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        </derivativeTransaction>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Reporting person acquired shares of common stock upon exercises of incentive stock options</footnote>
        <footnote id="F2">Holdings include 1,528 shares acquired 1/31/2007 pursuant to the Company's 2004 Employee Stock Purchase Plan</footnote>
        <footnote id="F3">Option vested with respect to 2,000 shares annually each November 19th beginning in 1998 with a total of 10,000 shares becoming fully vested on November 19, 2002</footnote>
        <footnote id="F4">Shares sold pursuant to existing 10(b)(5)-1 plan</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>Madelaine Salas, by Power of Attorney</signatureName>
        <signatureDate>2007-04-30</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
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</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----