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Consolidated Statements of Cash Flows (Parentheticals) - USD ($)
$ in Thousands
Dec. 31, 2021
Dec. 31, 2020
Dec. 31, 2019
Dec. 31, 2018
Restricted cash $ 1,512 $ 1,512 $ 5,835 $ 5,825
The 2.75% Convertible Notes [Member]        
Interest rate 2.75% 2.75%    
Convertible Debt [Member] | The 2.75% Convertible Notes [Member]        
Interest rate 2.75% 2.75% 2.75%