Stock-Based Compensation (Narrative) (Details) (USD $) In Millions, except Per Share data	3 Months Ended	9 Months Ended
	Jul. 02, 2011	Jul. 02, 2011
Stock-Based Compensation
Number of options granted	146,998
Weighted average exercise price	$ 6.83	$ 6.83
Intrinsic value of options	$ 2.5
Purchase price for the pre acquisition service period	0.1	0.1
Compensation expense over the vest period	$ 2.4	$ 2.4
Vesting period of stock options for employees of MKS		3Y