8-K

                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                              WASHINGTON, DC 20549


                                    Form 8-K

                                 CURRENT REPORT

     Pursuant to Section 13 or 15(d) of The Securities Exchange Act of 1934

Date of Report (Date of earliest event reported):  November 5, 2007
                                                   ----------------


                           Ibis Technology Corporation
                           ---------------------------
             (Exact name of registrant as specified in its charter)



Massachusetts                       0-23150                  04-2987600
- -------------                       -------                  ----------
(State or other jurisdiction        (Commission              (IRS Employer
of incorporation)                   File Number)             Identification No.)


32 Cherry Hill Drive, Danvers, Massachusetts  01923
- ---------------------------------------------------
(Address of principal executive offices)    (Zip Code)


Registrant's telephone number, including area code:  (978) 777-4247
                                                     --------------


Check the appropriate box below if the Form 8-K filing is intended to
simultaneously satisfy the filing obligation of the registrant under any of the
following provisions (see General Instruction A.2. below):

[ ] Written communications pursuant Rule 425 under the Securities Act
    (17 CFR 230.425)

[ ] Soliciting material pursuant to Rule 14a-12 under the Exchange Act
    (17 CFR 240.14a-12)

[ ] Pre-commencement communications pursuant to Rule 14d-2(b) under the
    Exchange Act (17 CFR 240.14d-2(b))

[ ] Pre-commencement communications pursuant to Rule 13e-4(c) under the
    Exchange Act (17 CFR 240.13e-4(c))




ITEM 8.01.  Ibis Technology Announces Unexpected Death of CEO

Ibis Technology Corporation, today announced that President and Chief Executive
Officer Charles McKenna died unexpectedly last Friday, November 2. The Company's
Board of Directors will be evaluating alternatives concerning the next steps
necessary for Ibis Technology Corporation.




ITEM 9.01.  FINANCIAL STATEMENTS AND EXHIBITS.

(a) Not applicable.

(b) Not applicable.

(c) Exhibits

      Exhibit 99.1.      Press Release issued by Ibis Technology Corporation on
                         November 5, 2007.




                                   SIGNATURES


         Pursuant to the requirements of the Securities Exchange Act of 1934,
the registrant has duly caused this report to be signed on its behalf by the
undersigned hereunto duly authorized.

                                           IBIS TECHNOLOGY CORPORATION
                                           ---------------------------


Date:  November 5, 2007                     /s/William J. Schmidt
                                  ------------------------------------------
                                  William J. Schmidt Chief Financial Officer




                                  EXHIBIT INDEX

Exhibit
Number                Description
- ------                -----------

99.1                  Press Release Announcing Death of CEO, Charles M. McKenna.

EX-99.1

                                                                    Exhibit 99.1

           Ibis Technology Announces Unexpected Death of CEO

    DANVERS, Mass.--(BUSINESS WIRE)--Nov. 5, 2007--Ibis Technology
Corporation (Nasdaq: IBIS), today announced that Chief Executive
Officer Charles M. McKenna died unexpectedly last Friday, November 2.
Martin Reid, chairman and former CEO, stated, "We at Ibis are shocked
and greatly saddened by Chuck's unexpected and untimely passing. He
was dedicated to the success of Ibis and a true industry leader in the
worldwide semiconductor industry. We will miss him greatly as a
colleague and friend. Our thoughts and sympathies are with his family
at this difficult time."

    Reid added, "I will continue in my role at Ibis and expand my
day-to-day efforts at the Company as we remain focused on our SOI
technology and SIMOX development." The Company's Board of Directors
will be evaluating alternatives concerning the next steps necessary
for Ibis Technology Corporation.

    About Ibis Technology

    Ibis Technology Corporation is a leading provider of oxygen
implanters for the production of SIMOX-SOI
(Separation-by-Implantation-of-Oxygen Silicon-On-Insulator) wafers for
the worldwide semiconductor industry. Headquartered in Danvers,
Massachusetts, Ibis Technology is traded on Nasdaq under the symbol
IBIS. Information about Ibis Technology Corporation and SIMOX-SOI is
available on the Ibis web site at www.ibis.com.

    CONTACT: Ibis Technology Corporation
             William J. Schmidt, 978-777-4247
             Chief Financial Officer