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Filing Detail
Form PRE 14A - Other preliminary proxy statements:
SEC Accession No. 0000950135-98-001465
Filing Date
1998-03-10
Accepted
1998-03-10 00:00:00
Documents
1
Period of Report
1998-05-14
SROs
NASD

Document Format Files

Seq Description Document Type Size
1 IBIS TECHNOLOGY CORPORATION PRE 14A 124881
  Complete submission text file 0000950135-98-001465.txt   126341
Mailing Address 32 CHERRY HILL DR 32 CHERRY HILL DR DANVERS MA 01923
Business Address 32 CHERRY HILL DR DANVERS MA 01923 5087774247
IBIS TECHNOLOGY CORP (Filer) CIK: 0000855182 (see all company filings)

IRS No.: 042987600 | State of Incorp.: MA | Fiscal Year End: 1231
Type: PRE 14A | Act: 34 | File No.: 000-23150 | Film No.: 98561466
SIC: 3674 Semiconductors & Related Devices