Exhibit 99.1






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NEWS RELEASE

FOR IMMEDIATE RELEASE
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                  IBIS TECHNOLOGY CORPORATION ANNOUNCES PRICING
             OF A PUBLIC OFFERING OF 900,000 SHARES OF COMMON STOCK

DANVERS, Mass., Mar. 22, 2002--Ibis Technology Corporation (Nasdaq: IBIS),
announced today the pricing of a public offering of 900,000 newly issued shares
of its common stock at $13.00 per share. The offering is being underwritten by
SoundView Technology Corporation. Ibis has granted SoundView an option to
purchase up to an additional 100,000 shares of common stock to cover
over-allotments, if any. All of the shares are being offered by Ibis through a
prospectus supplement pursuant to Ibis's shelf registration statement, which was
declared effective by the Securities and Exchange Commission on July 26, 1999.

Copies of the final prospectus related to the offering may be obtained from
SoundView Technology Corporation, 1700 East Putnam Avenue, Old Greenwich,
Connecticut 06870, (203) 321-7000.

ABOUT IBIS TECHNOLOGY
Ibis Technology Corporation is a leading provider of SIMOX-SOI
(Separation-by-IMplantation-of-OXygen Silicon-On-Insulator) wafers and equipment
for the worldwide semiconductor industry. The company is headquartered in
Danvers, Massachusetts and maintains an office in Aptos, California. Ibis
Technology is traded on the Nasdaq National Market under the symbol "IBIS."
Information about Ibis Technology Corporation and SIMOX-SOI is available on
Ibis' World Wide Web site at www.ibis.com.

A REGISTRATION STATEMENT RELATING TO THESE SECURITIES WAS FILED AND DECLARED
EFFECTIVE BY THE SECURITIES AND EXCHANGE COMMISSION. THIS PRESS RELEASE SHALL
NOT CONSTITUTE AN OFFER TO SELL OR THE SOLICITATION OF AN OFFER TO BUY THE
COMMON STOCK OF IBIS, NOR SHALL THERE BE ANY SALE OF THESE SECURITIES IN ANY
STATE OR JURISDICTION IN WHICH SUCH AN OFFER, SOLICITATION OR SALE WOULD BE
UNLAWFUL PRIOR TO REGISTRATION OR QUALIFICATION UNDER THE SECURITIES LAWS OF ANY
SUCH STATE OR JURISDICTION.

IBIS COMPANY CONTACT:                                      AGENCY CONTACT:

Debra L. Nelson                                            Bill Monigle
Chief Financial Officer                                    IR/PR Counsel
Ibis Technology Corporation                                For Ibis Technology
Phone: (978) 777-4247                                      Phone: (603) 424-1184

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