Commitments and Contingencies (Narrative) (Details) (USD $) In Millions, unless otherwise specified	12 Months Ended			0 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011	Dec. 28, 2012 Varep GmBh Case cause_of_action	Aug. 21, 2012 Varep GmBh Case cause_of_action
Loss Contingencies [Line Items]
Total rental expense	$ 1.4	$ 1.4	$ 1.1
Amount of purchase orders that had been entered into wafer work-in-process	$ 31.6
New claims filed, number				7	11