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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
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<SEC-DOCUMENT>0001209191-05-005146.txt : 20050127
<SEC-HEADER>0001209191-05-005146.hdr.sgml : 20050127
<ACCEPTANCE-DATETIME>20050127155005
ACCESSION NUMBER:		0001209191-05-005146
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20050126
FILED AS OF DATE:		20050127
DATE AS OF CHANGE:		20050127

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			FSI INTERNATIONAL INC
		CENTRAL INDEX KEY:			0000841692
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				411223238
		STATE OF INCORPORATION:			MN
		FISCAL YEAR END:			0831

	BUSINESS ADDRESS:	
		STREET 1:		3455 LYMAN BLVD.
		CITY:			CHASKA
		STATE:			MN
		ZIP:			55318
		BUSINESS PHONE:		9524485440

	MAIL ADDRESS:	
		STREET 1:		3455 LYMAN BLVD.
		CITY:			CHASKA
		STATE:			MN
		ZIP:			55318

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			BERNARDS JAMES A
		CENTRAL INDEX KEY:			0001008559

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-17276
		FILM NUMBER:		05553821

	BUSINESS ADDRESS:	
		STREET 1:		7200 METRO BLVD
		STREET 2:		SUITE 200
		CITY:			EDINA
		STATE:			MN
		ZIP:			55439
		BUSINESS PHONE:		6128316499

	MAIL ADDRESS:	
		STREET 1:		7200 METRO BLVD
		STREET 2:		STE 200
		CITY:			EDINA
		STATE:			MN
		ZIP:			55439
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>bmn91049_bmn3jab.xml
<DESCRIPTION>MAIN DOCUMENT DESCRIPTION
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2005-01-26</periodOfReport>

    <issuer>
        <issuerCik>0000841692</issuerCik>
        <issuerName>FSI INTERNATIONAL INC</issuerName>
        <issuerTradingSymbol>FSII</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001008559</rptOwnerCik>
            <rptOwnerName>BERNARDS JAMES A</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>11446 ZION ROAD</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>BLOOMINGTON</rptOwnerCity>
            <rptOwnerState>MN</rptOwnerState>
            <rptOwnerZipCode>55437</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable></nonDerivativeTable>

    <derivativeTable>
        <derivativeTransaction>
            <securityTitle>
                <value>Stock Option (Right to Buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>4.21</value>
            </conversionOrExercisePrice>
            <transactionDate>
                <value>2005-01-26</value>
            </transactionDate>
            <deemedExecutionDate>
                <value>2005-01-26</value>
            </deemedExecutionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>M</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>7500</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>4.21</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <exerciseDate>
                <value>2006-01-01</value>
            </exerciseDate>
            <expirationDate>
                <value>2015-01-26</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>7500</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>7500</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeTransaction>
    </derivativeTable>

    <ownerSignature>
        <signatureName>/s/ Patricia M. Hollister, Chief Financial Officer, as Power of Attorney for James A. Bernards</signatureName>
        <signatureDate>2005-01-26</signatureDate>
    </ownerSignature>
</ownershipDocument>

</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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