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DEBT, Hefei Equipment Loan (Details) - Hefei Equipment Loan [Member]
¥ in Millions, $ in Millions
1 Months Ended
Jul. 31, 2022
CNY (¥)
Jul. 31, 2022
USD ($)
Oct. 31, 2020
CNY (¥)
Tool
Debt Instruments [Abstract]      
Maximum borrowing capacity | ¥     ¥ 200.0
Repayment of long term debt ¥ 120.7 $ 18.0  
Number of lithography tools purchased | Tool     2