Revenue Concentrations, Significant Customers, and Geographic Areas (Summary Of Revenue By Product Line) (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2021	Dec. 31, 2020
Product Information [Line Items]
Revenues	$ 92,774	$ 70,117
High Precision 3D and 2D Sensors [Member]
Product Information [Line Items]
Revenues	25,941	17,522
Inspection and Metrology Systems [Member]
Product Information [Line Items]
Revenues	42,958	37,547
Semiconductor Sensors [Member]
Product Information [Line Items]
Revenues	$ 23,875	$ 15,048