<SEC-DOCUMENT>0001085146-22-003277-index.html : 20221007 <SEC-HEADER>0001085146-22-003277.hdr.sgml : 20221007 <ACCEPTANCE-DATETIME>20221007160103 ACCESSION NUMBER: 0001085146-22-003277 CONFORMED SUBMISSION TYPE: SC 13G/A PUBLIC DOCUMENT COUNT: 1 FILED AS OF DATE: 20221007 DATE AS OF CHANGE: 20221007 SUBJECT COMPANY: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: SC 13G/A SEC ACT: 1934 Act SEC FILE NUMBER: 005-60443 FILM NUMBER: 221300756 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 FILED BY: COMPANY DATA: COMPANY CONFORMED NAME: PRIMECAP MANAGEMENT CO/CA/ CENTRAL INDEX KEY: 0000763212 IRS NUMBER: 953868081 FILING VALUES: FORM TYPE: SC 13G/A BUSINESS ADDRESS: STREET 1: 177 EAST COLORADO BLVD. STREET 2: 11TH FLOOR CITY: PASADENA STATE: CA ZIP: 91105 BUSINESS PHONE: 6263049222 MAIL ADDRESS: STREET 1: 177 EAST COLORADO BLVD. STREET 2: 11TH FLOOR CITY: PASADENA STATE: CA ZIP: 91105 </SEC-HEADER> <DOCUMENT> <TYPE>SC 13G/A <SEQUENCE>1 <FILENAME>aclsa10_100722.htm <DESCRIPTION>PRIMECAP MANAGEMENT CO/CA/ <TEXT> Document 1 - file: aclsa10_100722.htm
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