<SEC-DOCUMENT>0001085146-22-000716-index.html : 20220210
<SEC-HEADER>0001085146-22-000716.hdr.sgml : 20220210
<ACCEPTANCE-DATETIME>20220210122112
ACCESSION NUMBER:		0001085146-22-000716
CONFORMED SUBMISSION TYPE:	SC 13G/A
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20220210
DATE AS OF CHANGE:		20220210

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-60443
		FILM NUMBER:		22612447

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			PRIMECAP MANAGEMENT CO/CA/
		CENTRAL INDEX KEY:			0000763212
		IRS NUMBER:				953868081

	FILING VALUES:
		FORM TYPE:		SC 13G/A

	BUSINESS ADDRESS:	
		STREET 1:		177 EAST COLORADO BLVD.
		STREET 2:		11TH FLOOR
		CITY:			PASADENA
		STATE:			CA
		ZIP:			91105
		BUSINESS PHONE:		6263049222

	MAIL ADDRESS:	
		STREET 1:		177 EAST COLORADO BLVD.
		STREET 2:		11TH FLOOR
		CITY:			PASADENA
		STATE:			CA
		ZIP:			91105
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13G/A
<SEQUENCE>1
<FILENAME>aclsa9_21022.htm
<DESCRIPTION>PRIMECAP MANAGEMENT CO/CA/
<TEXT>
Document 1 - file: aclsa9_21022.htm

</DOCUMENT>
</SEC-DOCUMENT>