Merger, Disposition and Acquisition Transactions, Acquisition (Details) - USD ($)		3 Months Ended	12 Months Ended
	Jul. 16, 2021	Sep. 30, 2021	Dec. 31, 2021	Dec. 31, 2020
Acquisitions [Abstract]
Acquisition agreement			$ 5,765,000
Cash paid, net			22,854,000	$ 0
Acquired in-process research and development			$ 80,538,000	$ 0
Novellus, Ltd. [Member]
Acquisitions [Abstract]
Business consideration	$ 124,000,000
Cash	$ 22,854,000
Acquisition of common stock (in shares)	7,022,000
Acquisition agreement	$ 102,000,000
Share price (in dollars per share)	$ 14.5253
Escrow shares (in shares)	741,000
Non-compete period			5 years
Each lock-up agreement extend term			3 years
Cash paid, net	$ 22,854,000
Lock-up period			3 years
Unrestricted shares, issued (in shares)	3,644,000
Unrestricted shares, fair value per share (in dollars per share)	$ 10.05
Restricted shares, issued (in shares)	3,378,000
Restricted shares, fair value per share (in dollars per share)	$ 6.53
Percentage of discount on fair value restricted shares	35.00%
Cash paid	$ 22,882,000
Cash acquired	(28,000)
Unrestricted shares, value	36,628,000
Restricted shares, value	22,056,000
Total fair value of consideration paid	81,538,000
Less amount of cash paid for NoveCite investment	(1,000,000)
Acquired in-process research and development	$ 80,538,000	$ 80,538,000
Novellus, Ltd. [Member] | Chairman of the Board of Directors, Chief Executive Officer and President [Member]
Acquisitions [Abstract]
Lock-up agreements common shares received in acquisition (in shares)	3,378,000
Novellus, Ltd. [Member] | Maximum [Member]
Acquisitions [Abstract]
Period of escrow			12 months
Percentage of common stock subject to the lock-up agreement	75.00%
NoveCite, INC. [Member]
Acquisitions [Abstract]
Percentage of total outstanding equity interests	25.00%