Description of Business (Details) (USD $) In Thousands, unless otherwise specified	0 Months Ended	3 Months Ended		9 Months Ended				0 Months Ended
	Dec. 30, 2011	Sep. 30, 2012 countries factories	Sep. 30, 2011	Sep. 30, 2012 countries factories	Sep. 30, 2011	Dec. 31, 2011	Dec. 31, 2010	Mar. 09, 2012 Semiconductor Business Unit [Member]	Dec. 14, 2009 Medical Products Business Unit [Member]
Number of Factories Which the Company's Equipment Has Been Installed		200		200
Number of Countries Which the Company's equipment has been installed		50		50
Disposal Date								Mar. 09, 2012	Dec. 14, 2009
Export Sales, Percentage		29.00%	70.00%	56.00%	58.00%
Operating Income (Loss) from continuing operations		$ (2,018)	$ (1,045)	$ (5,414)	$ (1,082)
Net cash provided by (used in) operating activities of discontinued operations				3,723	(1,083)
Net Cash Provided by (Used in) Operating Activities				(1,534)	(3,620)
Cash and Cash Equivalents		$ 5,178	$ 2,324	$ 5,178	$ 2,324	$ 4,758	$ 6,259
Line of Credit Facility, Expiration Date	Dec. 29, 2012