-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
 MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen
 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 VZ+sU9zkGRSw37IrkX0xqnjsLV+xEgmT65kJ10SlsBeoaL2AcE3xzSy91eNMORKi
 b/iHjXEaKFaZ1jiQOfKEnA==

<SEC-DOCUMENT>0000950117-09-000761.txt : 20090618
<SEC-HEADER>0000950117-09-000761.hdr.sgml : 20090617
<ACCEPTANCE-DATETIME>20090618114740
ACCESSION NUMBER:		0000950117-09-000761
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20090616
FILED AS OF DATE:		20090618
DATE AS OF CHANGE:		20090618

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			WILLIS GARY K
		CENTRAL INDEX KEY:			0001121475

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12944
		FILM NUMBER:		09898171

	MAIL ADDRESS:	
		STREET 1:		3 MATSON RIDGE
		CITY:			OLD LYME
		STATE:			CT
		ZIP:			06371

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ZYGO CORP
		CENTRAL INDEX KEY:			0000730716
		STANDARD INDUSTRIAL CLASSIFICATION:	OPTICAL INSTRUMENTS & LENSES [3827]
		IRS NUMBER:				060864500
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0630

	BUSINESS ADDRESS:	
		STREET 1:		LAUREL BROOK RD
		CITY:			MIDDLEFIELD
		STATE:			CT
		ZIP:			06455
		BUSINESS PHONE:		8603478506

	MAIL ADDRESS:	
		STREET 1:		LAUREL BROOK ROAD
		CITY:			MIDDLEFIELD
		STATE:			CT
		ZIP:			06455
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>rsr_16703.xml
<DESCRIPTION>FORM 3
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0203</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2009-06-16</periodOfReport>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000730716</issuerCik>
        <issuerName>ZYGO CORP</issuerName>
        <issuerTradingSymbol>ZIGO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001121475</rptOwnerCik>
            <rptOwnerName>WILLIS GARY K</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>3 MATSON RIDGE</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>OLD LYME</rptOwnerCity>
            <rptOwnerState>CT</rptOwnerState>
            <rptOwnerZipCode>06371</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeHolding>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>131646</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeHolding>
    </nonDerivativeTable>

    <ownerSignature>
        <signatureName>Gary K. Willis</signatureName>
        <signatureDate>2009-06-16</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----