UNITED STATES

SECURITIES AND EXCHANGE COMMISSION

WASHINGTON, D.C. 20549

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FORM 8-K

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CURRENT REPORT

PURSUANT TO SECTION 13 OR 15(D) OF THE

SECURITIES EXCHANGE ACT OF 1934

Date of Report (Date of earliest event reported) August 24, 2005

ZYGO CORPORATION

(Exact Name of Registrant as Specified in its Charter)

Delaware	0-12944	06-0964500
(State or Other Jurisdiction of Incorporation)	(Commission File Number)	(IRS Employer Identification No.)

Laurel Brook Road, Middlefield, CT	06455-0448
(Address of Principal Executive Offices)	(Zip Code)

Registrant’s telephone number, including area code: (860) 347-8506

Not Applicable

(Former Name or Former Address, if Changed Since Last Report)

Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions (see General Instruction A.2 below):

o Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)

o Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)

o Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))

o Pre-commencement communications pursuant to Rule 13e-4 (c) under the Exchange Act (17 CFR 240.13e-4(c))

Item 1.01 Entry into a Material Definitive Agreement.

On August 24, 2005, the Compensation Committee (the “Committee”) of the Board of Directors of Zygo Corporation (the “Company”) awarded, pursuant to the Company’s 2002 Equity Incentive Plan, each of the executive officers listed below: (i) an option to purchase the number of shares of the Company’s common stock, par value $.10 the (“Common Stock”) specified below at an exercise price of $10.40 per share (the “Options”) and (ii) the number of restricted shares of Common Stock (the “Restricted Stock”) specified below. In general, the Options will vest and become exercisable in quarterly increments over a four year period and the Restricted Stock will vest with respect to one-half of the shares on each of August 24, 2008 and August 24, 2009, provided that the recipient remains continuously employed by the Company through each applicable vesting date.

	Name		Shares subject to Stock Options		Shares of Restricted Stock
William H. Bacon		6,000		3,800
Doug Eccleston		8,000		4,800
Brian Monti		12,000		7,000
David Person		7,000		4,000
J. Bruce Robinson		40,000		16,000
Walter Shephard		15,000		9,500
Robert Smythe		-		1,300
Robert Stoner		8,000		5,000
Carl Zanoni		7,000		5,000

In addition, the Committee awarded an aggregate of 64,800 shares of Restricted Stock pursuant to the Plan to 97 non-executive officer employees of the Company.

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SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.

	ZYGO CORPORATION
Date: August 30, 2005	By:   /s/ J. Bruce Robinson Name: J. Bruce Robinson Title: Chairman, President and Chief Executive Officer

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