-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
 VlQH8VjPRRICGBuVAQARXVeEAb+ZzXE1AqWjflH5kTxiZENH3mIgy2gwbM7tUNvI
 CPxZWbEOGXhQ0MB+tqLx4w==

<SEC-DOCUMENT>0000950117-04-003984.txt : 20041115
<SEC-HEADER>0000950117-04-003984.hdr.sgml : 20041115
<ACCEPTANCE-DATETIME>20041115094657
ACCESSION NUMBER:		0000950117-04-003984
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20041111
FILED AS OF DATE:		20041115
DATE AS OF CHANGE:		20041115

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ZYGO CORP
		CENTRAL INDEX KEY:			0000730716
		STANDARD INDUSTRIAL CLASSIFICATION:	OPTICAL INSTRUMENTS & LENSES [3827]
		IRS NUMBER:				060864500
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0630

	BUSINESS ADDRESS:	
		STREET 1:		LAUREL BROOK RD
		CITY:			MIDDLEFIELD
		STATE:			CT
		ZIP:			06455
		BUSINESS PHONE:		8603478506

	MAIL ADDRESS:	
		STREET 1:		LAUREL BROOK ROAD
		CITY:			MIDDLEFIELD
		STATE:			CT
		ZIP:			06455

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			BANUCCI EUGENE
		CENTRAL INDEX KEY:			0001252282

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12944
		FILM NUMBER:		041142051

	BUSINESS ADDRESS:	
		STREET 1:		ZYGO CORP
		STREET 2:		LAUREL BROOK RD
		CITY:			MIDDLEFIELD
		STATE:			CT
		ZIP:			06455
		BUSINESS PHONE:		8603478506

	MAIL ADDRESS:	
		STREET 1:		ATMI
		STREET 2:		7 COMMERCE DR
		CITY:			DANBURY
		STATE:			CT
		ZIP:			06810
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>rsr_11037.xml
<DESCRIPTION>FORM 4
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2004-11-11</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000730716</issuerCik>
        <issuerName>ZYGO CORP</issuerName>
        <issuerTradingSymbol>ZIGO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001252282</rptOwnerCik>
            <rptOwnerName>BANUCCI EUGENE</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>20 SHORE ROAD</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>DANBURY</rptOwnerCity>
            <rptOwnerState>CT</rptOwnerState>
            <rptOwnerZipCode>06811</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeTransaction>
            <securityTitle>
                <value>Stock Option</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>10.92</value>
            </conversionOrExercisePrice>
            <transactionDate>
                <value>2004-11-11</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>6000</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <exerciseDate>
                <value>2004-11-11</value>
            </exerciseDate>
            <expirationDate>
                <value>2014-11-11</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>6000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>6000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeTransaction>
    </derivativeTable>

    <ownerSignature>
        <signatureName>Eugene G. Banucci</signatureName>
        <signatureDate>2004-11-15</signatureDate>
    </ownerSignature>
</ownershipDocument>

</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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