EXHIBIT 32.1

      CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER
           PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED PURSUANT TO
                  SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

I, J. Bruce Robinson, certify, pursuant to 18 U.S.C. Section 1350, as adopted to
Section 906 of the Sarbanes-Oxley Act of 2002, that the Quarterly Report of Zygo
Corporation on Form 10-Q for the fiscal quarter ended December 26, 2003 fully
complies with the requirements of Section 13(a) or 15(d) of the Securities
Exchange Act of 1934 and that information contained in such Quarterly Report on
Form 10-Q fairly presents, in all material respects, the financial condition and
results of operations of Zygo Corporation.

A signed original of this written statement required by Section 906 has been
provided to Zygo Corporation and will be retained by Zygo Corporation and
furnished to the Securities and Exchange Commission or its staff upon request.

                                             Dated: February 6, 2004


                                             /s/ J. Bruce Robinson
                                             -----------------------------------
                                             J. Bruce Robinson
                                             Chairman, President, and
                                             Chief Executive Officer of
                                             Zygo Corporation

I, Richard M. Dressler, certify, pursuant to 18 U.S.C. Section 1350, as adopted
to Section 906 of the Sarbanes-Oxley Act of 2002, that the Quarterly Report of
Zygo Corporation on Form 10-Q for the fiscal quarter ended December 26, 2003
fully complies with the requirements of Section 13(a) or 15(d) of the Securities
Exchange Act of 1934 and that information contained in such Quarterly Report on
Form 10-Q fairly presents, in all material respects, the financial condition and
results of operations of Zygo Corporation.

A signed original of this written statement required by Section 906 has been
provided to Zygo Corporation and will be retained by Zygo Corporation and
furnished to the Securities and Exchange Commission or its staff upon request.

                                             Dated: February 6, 2004


                                             /s/ Richard M. Dressler
                                             -----------------------------------
                                             Richard M. Dressler
                                             Vice President, Finance,
                                             Chief Financial Officer of
                                             Zygo Corporation