CONDENSED CONSOLIDATED BALANCE SHEETS (USD $) In Thousands, unless otherwise specified	Mar. 31, 2014	Jun. 30, 2013
Current assets:
Cash and cash equivalents	$ 97,056	$ 83,056
Receivables, net of allowance for doubtful accounts of $279 and $272, respectively	28,893	32,360
Inventories	35,131	30,185
Prepaid expenses, prepaid taxes and other current assets	5,029	5,429
Revenue recognized in excess of billings on uncompleted contracts	2,677	5,342
Deferred income taxes	11,900	8,631
Total current assets	180,686	165,003
Marketable securities	616	662
Property, plant and equipment, net	36,838	34,343
Deferred income taxes	8,214	10,490
Intangible assets, net	4,188	4,615
Total assets	230,542	215,113
Current liabilities:
Accounts payable	10,157	7,170
Progress payments and deferred revenue	4,344	4,538
Billings in excess of costs and estimated earnings on uncompleted contracts	2,832	6,481
Accrued salaries and wages	5,761	3,746
Other accrued expenses	3,517	4,558
Deferred income taxes	122	123
Income taxes payable	1,603	19
Total current liabilities	28,336	26,635
Deferred income taxes	1,568	704
Other long-term liabilities	4,778	3,769
Total liabilities	34,682	31,108
Commitments and contingencies
Equity:
Common stock, $0.10 par value per share: 40,000,000 shares authorized; 21,423,168 shares issued (20,858,158 at June 30, 2013); 18,979,845 shares outstanding (18,532,623 at June 30, 2013)	2,142	2,086
Additional paid-in capital	186,973	181,694
Retained earnings	34,962	26,855
Accumulated other comprehensive income (loss):
Currency translation effects	(253)	(641)
Unrealized gain (loss) on hedge		(16)
Treasury stock, at cost, 2,443,323 shares (2,325,535 at June 30, 2013)	(29,876)	(28,016)
Total shareholders’ equity - Zygo Corporation	193,948	181,962
Noncontrolling interest	1,912	2,043
Total equity	195,860	184,005
Total liabilities and equity	$ 230,542	$ 215,113