Segment and Major Customer Information (Tables)

9 Months Ended

Mar. 31, 2014

Segment Reporting [Abstract]

Schedule of Segment Reporting Information, by Segment [Table Text Block]

The following table sets forth segment net revenue, gross profit and gross margin for the three and nine months ended March 31, 2014 and 2013:

	Three Months Ended March 31,						Nine Months Ended March 31,
	2014			2013			2014			2013
Metrology Solutions
Net revenue	$	26,695		$	21,273		$	87,014		$	68,566
Gross profit	$	14,684		$	11,796		$	49,866		$	37,724
Gross margin		55	%		55	%		57	%		55	%
Optical Systems
Net revenue	$	13,018		$	13,260		$	40,978		$	40,808
Gross profit	$	3,396		$	3,464		$	11,347		$	10,312
Gross margin		26	%		26	%		28	%		25	%
Total
Net revenue	$	39,713		$	34,533		$	127,992		$	109,374
Gross profit	$	18,080		$	15,260		$	61,213		$	48,036
Gross margin		46	%		44	%		48	%		44	%

Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]

The following table sets forth revenue by geographic area:

	Three Months Ended March 31,				Nine Months Ended March 31,
	2014		2013		2014		2013
Americas	$	16,161	$	18,744	$	56,105	$	57,361
Japan		9,741		6,728		35,253		18,395
China		4,982		2,619		12,833		13,655
Europe		6,946		4,914		16,007		14,134
Pacific Rim		1,883		1,528		7,794		5,829
Total	$	39,713	$	34,533	$	127,992	$	109,374