Shareholders' Equity (Tables)

9 Months Ended

Mar. 31, 2014

Stockholders' Equity Note [Abstract]

Schedule of Stockholders Equity [Table Text Block]

The following table sets forth shareholders’ equity and noncontrolling interest for the nine months ended March 31, 2014 and 2013:

	Nine Months Ended March 31,
	2014									2013
	Shareholders’ Equity			Non- Controlling			Total			Shareholders’ Equity			Non- Controlling			Total
	Zygo Corp.			Interest			Equity			Zygo Corp.			Interest			Equity
Equity, beginning of period	$	181,962		$	2,043		$	184,005		$	173,482		$	2,355		$	175,837
Net income		8,107			305			8,412			3,597			875			4,472
Unrealized gain on hedge		16			—			16			—			—			—
Foreign currency translation effect		388			22			410			(337	)		79			(258	)
Total		8,511			327			8,838			3,260			954			4,214
Share-based compensation		3,958			—			3,958			4,620			—			4,620
Repurchase of restricted stock		(1,860	)		—			(1,860	)		(1,176	)		—			(1,176	)
Employee stock purchase		83			—			83			40			—			40
Exercise of employee stock options and related tax effect		1,294			—			1,294			1,066			—			1,066
Dividends attributable to noncontrolling interest		—			(458	)		(458	)		—			(1,101	)		(1,101	)
Purchase of subsidiary shares from noncontrolling interest		—			—			—			(2,777	)		(378	)		(3,155	)
Equity, end of period	$	193,948		$	1,912		$	195,860		$	178,515		$	1,830		$	180,345