CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Share data, unless otherwise specified	3 Months Ended		9 Months Ended
	Mar. 31, 2014	Mar. 31, 2013	Mar. 31, 2014	Mar. 31, 2013
Net revenue	$ 39,713	$ 34,533	$ 127,992	$ 109,374
Cost of goods sold	21,633	19,273	66,779	61,338
Gross profit	18,080	15,260	61,213	48,036
Selling, general and administrative expenses	10,141	9,362	33,164	26,451
Research, development and engineering expenses	4,742	4,990	14,916	14,073
Operating profit	3,197	908	13,133	7,512
Other miscellaneous income (expense), net	45	(266)	150	(438)
Income before income taxes, including noncontrolling interest	3,242	642	13,283	7,074
Income tax benefit (expense)	(1,331)	504	(4,871)	(2,602)
Net income including noncontrolling interest	1,911	1,146	8,412	4,472
Less: Net income attributable to noncontrolling interest	13	166	305	875
Net income attributable to Zygo Corporation	$ 1,898	$ 980	$ 8,107	$ 3,597
Earnings per share attributable to Zygo Corporation
Basic earnings per share (in Dollars per share)	$ 0.10	$ 0.05	$ 0.43	$ 0.20
Diluted earnings per share (in Dollars per share)	$ 0.10	$ 0.05	$ 0.42	$ 0.19
Weighted average shares outstanding
Basic shares (in Shares)	18,900,329	18,505,621	18,771,281	18,433,765
Diluted shares (in Shares)	19,336,455	19,126,198	19,284,071	19,079,505