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Shareholders' Equity (Tables)
6 Months Ended
Dec. 31, 2013
Stockholders' Equity Note [Abstract]  
Schedule of Stockholders Equity [Table Text Block] The following table sets forth shareholders’ equity and noncontrolling interest for the six months ended December 31, 2013 and 2012:

    Six Months Ended December 31,  
    2013     2012  
    Shareholders’
Equity
Zygo Corp.
    Non-
Controlling
Interest
    Total
Equity
    Shareholders’
Equity
Zygo Corp.
    Non-
Controlling
Interest
    Total
Equity
 
Equity, beginning of period   $ 181,962     $ 2,043     $ 184,005     $ 173,482     $ 2,355     $ 175,837  
                                                 
Net income     6,209       292       6,501       2,617       709       3,326  
Unrealized gain on hedge     159             159                    
Foreign currency translation effect     551       13       564       261       104       365  
Total     6,919       305       7,224       2,878       813       3,691  
Share-based compensation     2,821             2,821       3,988             3,988  
Repurchase of restricted stock     (1,748 )           (1,748 )     (1,078 )           (1,078 )
Employee stock purchase     56             56       15             15  
Exercise of employee stock options and related tax effect     255             255       868             868  
Dividends attributable to noncontrolling interest           (458 )     (458 )           (1,101 )     (1,101 )
Purchase of subsidiary shares from noncontrolling interest                       (2,777 )     (378 )     (3,155 )
Equity, end of period   $ 190,265     $ 1,890     $ 192,155     $ 177,376     $ 1,689     $ 179,065