CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Share data, unless otherwise specified	3 Months Ended		6 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2013	Dec. 31, 2012
Net revenue	$ 48,161	$ 34,635	$ 88,279	$ 74,841
Cost of goods sold	23,365	19,352	45,146	42,065
Gross profit	24,796	15,283	43,133	32,776
Selling, general and administrative expenses	13,070	8,568	23,023	17,089
Research, development and engineering expenses	5,209	4,502	10,174	9,083
Operating profit	6,517	2,213	9,936	6,604
Other income (expense)
Miscellaneous income (expense), net	(185)	(208)	105	(172)
Total other income (expense)	(185)	(208)	105	(172)
Income before income taxes, including noncontrolling interest	6,332	2,005	10,041	6,432
Income tax expense	(2,135)	(1,064)	(3,540)	(3,106)
Net income including noncontrolling interest	4,197	941	6,501	3,326
Less: Net income attributable to noncontrolling interest	143	103	292	709
Net income attributable to Zygo Corporation	$ 4,054	$ 838	$ 6,209	$ 2,617
Earnings per share attributable to Zygo Corporation
Basic earnings per share (in Dollars per share)	$ 0.22	$ 0.05	$ 0.33	$ 0.14
Diluted earnings per share (in Dollars per share)	$ 0.21	$ 0.04	$ 0.32	$ 0.14
Weighted average shares outstanding
Basic shares (in Shares)	18,801,670	18,455,136	18,708,159	18,398,228
Diluted shares (in Shares)	19,332,503	19,069,676	19,291,579	19,059,822