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Segment and Major Customer Information (Tables)

3 Months Ended

Sep. 30, 2013

Schedule of Segment Reporting Information, by Segment [Table Text Block]

The following table sets forth segment net revenue, gross profit and gross margin for the three months ended September 30, 2013 and 2012:

	Three Months Ended September 30,
	2013			2012
Metrology Solutions
Net revenue	$	26,444		$	25,878
Gross profit	$	14,557		$	14,335
Gross margin		55	%		55	%

Optical Systems
Net revenue	$	13,674		$	14,328
Gross profit	$	3,780		$	3,158
Gross margin		28	%		22	%

Total
Net revenue	$	40,118		$	40,206
Gross profit	$	18,337		$	17,493
Gross margin		46	%		44	%

Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]

The following table sets forth revenue by geographic area:

	Three Months Ended September 30,
	2013		2012
Americas	$	19,094	$	18,863
Japan		8,802		6,331
China		3,747		7,538
Europe		5,271		4,822
Pacific Rim		3,204		2,652
Total	$	40,118	$	40,206

- Definition

Tabular disclosure of the profit or loss and total assets for each reportable segment. An entity discloses certain information on each reportable segment if the amounts (a) are included in the measure of segment profit or loss reviewed by the chief operating decision maker or (b) are otherwise regularly provided to the chief operating decision maker, even if not included in that measure of segment profit or loss.

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