CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Share data, unless otherwise specified	3 Months Ended
	Sep. 30, 2013	Sep. 30, 2012
Net revenue	$ 40,118	$ 40,206
Cost of goods sold	21,781	22,713
Gross profit	18,337	17,493
Selling, general and administrative expenses	9,953	8,521
Research, development and engineering expenses	4,965	4,581
Operating profit	3,419	4,391
Other income
Miscellaneous income, net	290	36
Total other income	290	36
Income before income taxes, including noncontrolling interest	3,709	4,427
Income tax expense	(3,160)	(1,433)
Net income including noncontrolling interests	549	2,994
Less: Net income attributable to noncontrolling interest	149	606
Net income attributable to Zygo Corporation	$ 400	$ 2,388
Earnings per share attributable to Zygo Corporation
Basic earnings per share (in Dollars per share)	$ 0.02	$ 0.13
Diluted earnings per share (in Dollars per share)	$ 0.02	$ 0.13
Weighted average shares outstanding
Basic shares (in Shares)	18,614,648	18,341,320
Diluted shares (in Shares)	19,253,711	19,047,104