SHARE-BASED COMPENSATION PLANS (Details) (USD $) In Thousands, except Share data, unless otherwise specified	12 Months Ended
	Jun. 30, 2013	Jun. 30, 2012	Jun. 30, 2011
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized (in Shares)	1,650,000
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant (in Shares)	1,490,691
Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period	4 years
Percentage Of Vested Options And Grants Of Restricted Stock Units	25.00%
Description Of Restricted Stock Awards Granted Prior	Restricted stock awards granted prior to January 1, 2011 under the Zygo Corporation 2002 Equity Incentive Plan ("2002 Plan"), as amended in 2006, vest 50% after three years and 50% after four years
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period (in Shares)	162,901	176,812	362,500
Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Weighted Average Grant Date Fair Value (in Dollars per share)	$ 10.79	$ 7.21	$ 5.68
Share-based Compensation	$ 5,546	$ 4,128	$ 3,965
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	2,078	1,486	1,427
Increase Cost of Goods Sold	1,003	790	650
Increase Selling, General And Administrative Expenses	4,010	2,708	2,416
Increase Research, Development And Engineering Expenses	533	630	899
Period of Non Payment of Dividend	5 years
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value	5,254	8,506
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	6 years 109 days	6 years 146 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value	3,867	4,763
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term	5 years 36 days	4 years 292 days
Employee Service Share-based Compensation, Nonvested Awards, Compensation Not yet Recognized, Stock Options	1,667
Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized, Period for Recognition	1 year 328 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Intrinsic Value	889	2,823	449
Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested in Period, Fair Value	700	803	959
Tax Benefit from Stock Options Exercised	1,221	2,629	1,834
Restricted Stock [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Period Considered Before Vesting	1 year
Restricted Stock Units (RSUs) [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant (in Shares)	1,490,691
Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized, Period for Recognition	1 year 146 days
Employee Service Share-based Compensation, Nonvested Awards, Compensation Not yet Recognized, Share-based Awards Other than Options	$ 2,308
Prior To January 1, 2011 [Member] | Equity Incentive Plan [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Percentage Of Lapse Rate On Restricted Stock Units Granted To Employees	50.00%
Remaining Percentage Of Lapse Rate On Restricted Stock Units Granted To Employees	50.00%
Equity Incentive Plan [Member] | Vesting Portion One [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period	3 years
Equity Incentive Plan [Member] | Vesting Portion Two [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period	4 years
Equity Incentive Plan [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant (in Shares)	0
Share-based Compensation Arrangement by Share-based Payment Award, Expiration Date	Aug. 27, 2012
Non Employee Director [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period	4 years
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period (in Shares)	5,000
Share Based Compensation Arrangement by Share Based Payment Award Vesting Percentage	25.00%
Each New Non Employee Director [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period (in Shares)	16,000
Maximum [Member]
SHARE-BASED COMPENSATION PLANS (Details) [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period	10 years