Changes in Zygo Corporation Ownership Interest in Subsidiary (Details) - Equity of changes in ownership interest (USD $) In Thousands, unless otherwise specified	3 Months Ended								12 Months Ended
	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2011	Jun. 30, 2013	Jun. 30, 2012	Jun. 30, 2011
Equity of changes in ownership interest [Abstract]
Net income attributable to Zygo Corporation	$ 2,518	$ 1,366	$ 1,579	$ 2,388	$ 24,964	$ 5,407	$ 6,178	$ 6,469	$ 7,851	$ 43,018	$ 19,079
Transfers to the noncontrolling interest
Decrease in Zygo Corporation paid in-capital for purchase of noncontrolling interest									2,749
Net transfers to noncontrolling interest									2,749
Change from net income attributable to Zygo Corporation shareholders and transfers to noncontrolling interest									$ 5,102	$ 43,018	$ 19,079